JPS6111225Y2 - - Google Patents
Info
- Publication number
- JPS6111225Y2 JPS6111225Y2 JP4543181U JP4543181U JPS6111225Y2 JP S6111225 Y2 JPS6111225 Y2 JP S6111225Y2 JP 4543181 U JP4543181 U JP 4543181U JP 4543181 U JP4543181 U JP 4543181U JP S6111225 Y2 JPS6111225 Y2 JP S6111225Y2
- Authority
- JP
- Japan
- Prior art keywords
- seal
- roll
- differential pressure
- gas
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001771 vacuum deposition Methods 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- 229910052802 copper Inorganic materials 0.000 description 15
- 239000010949 copper Substances 0.000 description 15
- 238000007789 sealing Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000005246 galvanizing Methods 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 241001163841 Albugo ipomoeae-panduratae Species 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Rolls And Other Rotary Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4543181U JPS6111225Y2 (enrdf_load_stackoverflow) | 1981-04-01 | 1981-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4543181U JPS6111225Y2 (enrdf_load_stackoverflow) | 1981-04-01 | 1981-04-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57162370U JPS57162370U (enrdf_load_stackoverflow) | 1982-10-13 |
| JPS6111225Y2 true JPS6111225Y2 (enrdf_load_stackoverflow) | 1986-04-09 |
Family
ID=29842323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4543181U Expired JPS6111225Y2 (enrdf_load_stackoverflow) | 1981-04-01 | 1981-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111225Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6213571A (ja) * | 1985-07-11 | 1987-01-22 | Nisshin Steel Co Ltd | 片面連続真空蒸着方法 |
| JP7369014B2 (ja) * | 2018-12-06 | 2023-10-25 | 株式会社カネカ | シール装置、真空装置、成膜装置、及びフィルム製造方法 |
| JP7336366B2 (ja) * | 2019-11-20 | 2023-08-31 | 株式会社カネカ | シール装置、真空装置、成膜装置及び多層フィルム製造方法 |
-
1981
- 1981-04-01 JP JP4543181U patent/JPS6111225Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57162370U (enrdf_load_stackoverflow) | 1982-10-13 |
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