JPH0566986B2 - - Google Patents

Info

Publication number
JPH0566986B2
JPH0566986B2 JP18644486A JP18644486A JPH0566986B2 JP H0566986 B2 JPH0566986 B2 JP H0566986B2 JP 18644486 A JP18644486 A JP 18644486A JP 18644486 A JP18644486 A JP 18644486A JP H0566986 B2 JPH0566986 B2 JP H0566986B2
Authority
JP
Japan
Prior art keywords
substrate
moving
moving body
speed
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18644486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342474A (ja
Inventor
Yoshio Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Graphtec Corp
Original Assignee
Graphtec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Graphtec Corp filed Critical Graphtec Corp
Priority to JP18644486A priority Critical patent/JPS6342474A/ja
Publication of JPS6342474A publication Critical patent/JPS6342474A/ja
Publication of JPH0566986B2 publication Critical patent/JPH0566986B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP18644486A 1986-08-08 1986-08-08 非接触速度検出器 Granted JPS6342474A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18644486A JPS6342474A (ja) 1986-08-08 1986-08-08 非接触速度検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18644486A JPS6342474A (ja) 1986-08-08 1986-08-08 非接触速度検出器

Publications (2)

Publication Number Publication Date
JPS6342474A JPS6342474A (ja) 1988-02-23
JPH0566986B2 true JPH0566986B2 (cs) 1993-09-22

Family

ID=16188555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18644486A Granted JPS6342474A (ja) 1986-08-08 1986-08-08 非接触速度検出器

Country Status (1)

Country Link
JP (1) JPS6342474A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769336B2 (ja) * 1990-05-14 1995-07-26 グラフテック株式会社 速度センサ装置

Also Published As

Publication number Publication date
JPS6342474A (ja) 1988-02-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term