JPH056654Y2 - - Google Patents

Info

Publication number
JPH056654Y2
JPH056654Y2 JP1985199405U JP19940585U JPH056654Y2 JP H056654 Y2 JPH056654 Y2 JP H056654Y2 JP 1985199405 U JP1985199405 U JP 1985199405U JP 19940585 U JP19940585 U JP 19940585U JP H056654 Y2 JPH056654 Y2 JP H056654Y2
Authority
JP
Japan
Prior art keywords
waveguide
substrate
discharge tube
heater
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985199405U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62109448U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985199405U priority Critical patent/JPH056654Y2/ja
Publication of JPS62109448U publication Critical patent/JPS62109448U/ja
Application granted granted Critical
Publication of JPH056654Y2 publication Critical patent/JPH056654Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
  • Drying Of Semiconductors (AREA)
JP1985199405U 1985-12-27 1985-12-27 Expired - Lifetime JPH056654Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985199405U JPH056654Y2 (cs) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985199405U JPH056654Y2 (cs) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109448U JPS62109448U (cs) 1987-07-13
JPH056654Y2 true JPH056654Y2 (cs) 1993-02-19

Family

ID=31160998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985199405U Expired - Lifetime JPH056654Y2 (cs) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH056654Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118636A (en) * 1979-03-08 1980-09-11 Toshiba Corp Gas etching method and device
JPS5776846A (en) * 1980-10-31 1982-05-14 Fujitsu Ltd Surface treating method for semiconductor

Also Published As

Publication number Publication date
JPS62109448U (cs) 1987-07-13

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