JPH0565303B2 - - Google Patents

Info

Publication number
JPH0565303B2
JPH0565303B2 JP61308139A JP30813986A JPH0565303B2 JP H0565303 B2 JPH0565303 B2 JP H0565303B2 JP 61308139 A JP61308139 A JP 61308139A JP 30813986 A JP30813986 A JP 30813986A JP H0565303 B2 JPH0565303 B2 JP H0565303B2
Authority
JP
Japan
Prior art keywords
axis
axis direction
linear motion
nut box
nut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61308139A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63162132A (ja
Inventor
Seiji Takei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Thompson Co Ltd
Original Assignee
Nippon Thompson Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Thompson Co Ltd filed Critical Nippon Thompson Co Ltd
Priority to JP61308139A priority Critical patent/JPS63162132A/ja
Priority to US07/065,875 priority patent/US4763886A/en
Priority to DE19873732570 priority patent/DE3732570A1/de
Publication of JPS63162132A publication Critical patent/JPS63162132A/ja
Publication of JPH0565303B2 publication Critical patent/JPH0565303B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Transmission Devices (AREA)
JP61308139A 1986-12-26 1986-12-26 Ｘｙテ−ブル Granted JPS63162132A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61308139A JPS63162132A (ja) 1986-12-26 1986-12-26 Ｘｙテ−ブル
US07/065,875 US4763886A (en) 1986-12-26 1987-06-24 XY-positioning table
DE19873732570 DE3732570A1 (de) 1986-12-26 1987-09-26 In einer xy-ebene verschiebbarer tisch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61308139A JPS63162132A (ja) 1986-12-26 1986-12-26 Ｘｙテ−ブル

Publications (2)

Publication Number Publication Date
JPS63162132A JPS63162132A (ja) 1988-07-05
JPH0565303B2 true JPH0565303B2 (US06272168-20010807-M00014.png) 1993-09-17

Family

ID=17977358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61308139A Granted JPS63162132A (ja) 1986-12-26 1986-12-26 Ｘｙテ−ブル

Country Status (3)

Country Link
US (1) US4763886A (US06272168-20010807-M00014.png)
JP (1) JPS63162132A (US06272168-20010807-M00014.png)
DE (1) DE3732570A1 (US06272168-20010807-M00014.png)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623569B2 (ja) * 1985-07-15 1994-03-30 松下電器産業株式会社 移動テーブル
US5022619A (en) * 1988-12-09 1991-06-11 Tokyo Aircraft Instrument Co., Ltd. Positioning device of table for semiconductor wafers
US5013016A (en) * 1990-06-18 1991-05-07 Sankyo Manufacturing Company, Ltd. Positioning table
DE9017035U1 (de) * 1990-12-18 1991-03-07 Nadella-Waelzlager Gmbh, 7000 Stuttgart Linearführung mit Spindelantrieb
US5523941A (en) * 1994-10-04 1996-06-04 Burton; Gary L. X-Y-theta positioning mechanism
JP3455016B2 (ja) * 1996-06-20 2003-10-06 シグマ光機株式会社 直線運動ステージの鋼球ガイド溝加工方法およびその装置
US6334960B1 (en) 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
US6873087B1 (en) 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
WO2002008835A2 (en) 2000-07-16 2002-01-31 Board Of Regents, The University Of Texas System High-resolution overlay alignment methods and systems for imprint lithography
EP2270592B1 (en) 2000-07-17 2015-09-02 Board of Regents, The University of Texas System Method of forming a pattern on a substrate
KR20030040378A (ko) 2000-08-01 2003-05-22 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 임프린트 리소그래피를 위한 투명한 템플릿과 기판사이의고정확성 갭 및 방향설정 감지 방법
AU2001286573A1 (en) 2000-08-21 2002-03-04 Board Of Regents, The University Of Texas System Flexure based macro motion translation stage
KR101031528B1 (ko) 2000-10-12 2011-04-27 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 실온 저압 마이크로- 및 나노- 임프린트 리소그래피용템플릿
US6964793B2 (en) 2002-05-16 2005-11-15 Board Of Regents, The University Of Texas System Method for fabricating nanoscale patterns in light curable compositions using an electric field
US7077992B2 (en) 2002-07-11 2006-07-18 Molecular Imprints, Inc. Step and repeat imprint lithography processes
US6900881B2 (en) * 2002-07-11 2005-05-31 Molecular Imprints, Inc. Step and repeat imprint lithography systems
US6932934B2 (en) * 2002-07-11 2005-08-23 Molecular Imprints, Inc. Formation of discontinuous films during an imprint lithography process
US7070405B2 (en) 2002-08-01 2006-07-04 Molecular Imprints, Inc. Alignment systems for imprint lithography
US6916584B2 (en) 2002-08-01 2005-07-12 Molecular Imprints, Inc. Alignment methods for imprint lithography
US7071088B2 (en) 2002-08-23 2006-07-04 Molecular Imprints, Inc. Method for fabricating bulbous-shaped vias
US8349241B2 (en) 2002-10-04 2013-01-08 Molecular Imprints, Inc. Method to arrange features on a substrate to replicate features having minimal dimensional variability
US6929762B2 (en) 2002-11-13 2005-08-16 Molecular Imprints, Inc. Method of reducing pattern distortions during imprint lithography processes
GB2395926B (en) * 2002-12-07 2004-10-27 Kun Yi Lin A working table
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7452574B2 (en) 2003-02-27 2008-11-18 Molecular Imprints, Inc. Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
JP2004028329A (ja) * 2003-03-28 2004-01-29 Sigma Koki Kk 直線運動ステージ
US6805054B1 (en) 2003-05-14 2004-10-19 Molecular Imprints, Inc. Method, system and holder for transferring templates during imprint lithography processes
ATE487579T1 (de) * 2003-05-14 2010-11-15 Molecular Imprints Inc Verfahren, system, halter und anordnung zur übertragung von templates bei imprint- lithographieverfahren
US6951173B1 (en) * 2003-05-14 2005-10-04 Molecular Imprints, Inc. Assembly and method for transferring imprint lithography templates
US7157036B2 (en) 2003-06-17 2007-01-02 Molecular Imprints, Inc Method to reduce adhesion between a conformable region and a pattern of a mold
US7136150B2 (en) 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
US20050106321A1 (en) * 2003-11-14 2005-05-19 Molecular Imprints, Inc. Dispense geometery to achieve high-speed filling and throughput
US8076386B2 (en) 2004-02-23 2011-12-13 Molecular Imprints, Inc. Materials for imprint lithography
US7906180B2 (en) 2004-02-27 2011-03-15 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US20070074635A1 (en) * 2005-08-25 2007-04-05 Molecular Imprints, Inc. System to couple a body and a docking plate
US7665981B2 (en) * 2005-08-25 2010-02-23 Molecular Imprints, Inc. System to transfer a template transfer body between a motion stage and a docking plate
US20070064384A1 (en) * 2005-08-25 2007-03-22 Molecular Imprints, Inc. Method to transfer a template transfer body between a motion stage and a docking plate
GB2452295A (en) * 2007-08-30 2009-03-04 Feng-Tien Chen CNC machine tool having a sliding member moveable at a high s peed
CN101486150B (zh) * 2008-01-16 2012-01-25 鸿富锦精密工业（深圳）有限公司 夹具
US7997173B2 (en) * 2009-05-01 2011-08-16 Teng Hung Wang Adjustable tool supporting mechanism for machine tool
ATE516915T1 (de) 2009-05-19 2011-08-15 Teng-Hung Wang Einstellbarer werkzeughilfsmechanismus für eine werkzeugmaschine
JP6535172B2 (ja) * 2015-01-28 2019-06-26 日本トムソン株式会社 可動コイル型リニアモータを内蔵した立軸用スライド装置
JP1538139S (US06272168-20010807-M00014.png) * 2015-04-03 2015-11-16
USD815166S1 (en) * 2017-03-10 2018-04-10 Techno Dynamics Inc. Positioning table
TWI703277B (zh) * 2018-05-31 2020-09-01 全研科技有限公司 高荷重多軸調整裝置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58831U (ja) * 1981-06-24 1983-01-06 株式会社日立製作所 高速作動可能なｘｙテ−ブル機構

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IE42162B1 (en) * 1974-10-11 1980-06-18 Lingner & Fischer Gmbh Thickening solutions of film-forming polymer
JPS5761436A (en) * 1980-09-30 1982-04-13 Toshiba Corp X-y table
SU1024211A1 (ru) * 1981-08-17 1983-06-23 Предприятие П/Я В-8657 Двухкоординатный стол
JPS5972727A (ja) * 1982-10-19 1984-04-24 Matsushita Electric Ind Co Ltd 位置合わせ用テ−ブル

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58831U (ja) * 1981-06-24 1983-01-06 株式会社日立製作所 高速作動可能なｘｙテ−ブル機構

Also Published As

Publication number Publication date
JPS63162132A (ja) 1988-07-05
DE3732570A1 (de) 1988-07-07
US4763886A (en) 1988-08-16
DE3732570C2 (US06272168-20010807-M00014.png) 1991-12-12

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