JPH0565048B2 - - Google Patents

Info

Publication number
JPH0565048B2
JPH0565048B2 JP61248790A JP24879086A JPH0565048B2 JP H0565048 B2 JPH0565048 B2 JP H0565048B2 JP 61248790 A JP61248790 A JP 61248790A JP 24879086 A JP24879086 A JP 24879086A JP H0565048 B2 JPH0565048 B2 JP H0565048B2
Authority
JP
Japan
Prior art keywords
alignment
semiconductor wafer
alignment mark
resist layer
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61248790A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63102314A (ja
Inventor
Masayuki Tomoyasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP61248790A priority Critical patent/JPS63102314A/ja
Publication of JPS63102314A publication Critical patent/JPS63102314A/ja
Publication of JPH0565048B2 publication Critical patent/JPH0565048B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61248790A 1986-10-20 1986-10-20 多層レジストプロセスにおけるアライメント方法 Granted JPS63102314A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61248790A JPS63102314A (ja) 1986-10-20 1986-10-20 多層レジストプロセスにおけるアライメント方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61248790A JPS63102314A (ja) 1986-10-20 1986-10-20 多層レジストプロセスにおけるアライメント方法

Publications (2)

Publication Number Publication Date
JPS63102314A JPS63102314A (ja) 1988-05-07
JPH0565048B2 true JPH0565048B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-16

Family

ID=17183435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61248790A Granted JPS63102314A (ja) 1986-10-20 1986-10-20 多層レジストプロセスにおけるアライメント方法

Country Status (1)

Country Link
JP (1) JPS63102314A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536837U (ja) * 1991-10-14 1993-05-18 株式会社アドバンテスト ウエーハｏｆ位置検出装置

Also Published As

Publication number Publication date
JPS63102314A (ja) 1988-05-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees