JPH0564697B2 - - Google Patents

Info

Publication number
JPH0564697B2
JPH0564697B2 JP62021495A JP2149587A JPH0564697B2 JP H0564697 B2 JPH0564697 B2 JP H0564697B2 JP 62021495 A JP62021495 A JP 62021495A JP 2149587 A JP2149587 A JP 2149587A JP H0564697 B2 JPH0564697 B2 JP H0564697B2
Authority
JP
Japan
Prior art keywords
aluminum nitride
weight
sintered body
parts
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62021495A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63190133A (ja
Inventor
Kazuo Eda
Takashi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP62021495A priority Critical patent/JPS63190133A/ja
Publication of JPS63190133A publication Critical patent/JPS63190133A/ja
Publication of JPH0564697B2 publication Critical patent/JPH0564697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Powder Metallurgy (AREA)
JP62021495A 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法 Granted JPS63190133A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62021495A JPS63190133A (ja) 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62021495A JPS63190133A (ja) 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
JPS63190133A JPS63190133A (ja) 1988-08-05
JPH0564697B2 true JPH0564697B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-16

Family

ID=12056549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62021495A Granted JPS63190133A (ja) 1987-01-31 1987-01-31 窒化アルミニウム焼結体およびその製造方法

Country Status (1)

Country Link
JP (1) JPS63190133A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0757023A3 (en) * 1995-08-03 1997-08-13 Ngk Insulators Ltd Sintered aluminum nitride bodies and their use for the production of semiconductors

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264388A (en) * 1988-05-16 1993-11-23 Sumitomo Electric Industries, Inc. Sintered body of aluminum nitride
WO2014057564A1 (ja) * 2012-10-11 2014-04-17 岩谷産業株式会社 凍結乾燥法を用いたナノ粒子乾燥体の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61295275A (ja) * 1985-06-24 1986-12-26 日本特殊陶業株式会社 高熱伝導性窒化アルミニウム焼結体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0757023A3 (en) * 1995-08-03 1997-08-13 Ngk Insulators Ltd Sintered aluminum nitride bodies and their use for the production of semiconductors
EP0992470A3 (en) * 1995-08-03 2002-07-17 Ngk Insulators, Ltd. Aluminium nitride sintered bodies and their use as substrate in an apparatus for producing semiconductors

Also Published As

Publication number Publication date
JPS63190133A (ja) 1988-08-05

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