JPH0564392B2 - - Google Patents
Info
- Publication number
- JPH0564392B2 JPH0564392B2 JP60228634A JP22863485A JPH0564392B2 JP H0564392 B2 JPH0564392 B2 JP H0564392B2 JP 60228634 A JP60228634 A JP 60228634A JP 22863485 A JP22863485 A JP 22863485A JP H0564392 B2 JPH0564392 B2 JP H0564392B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- data
- patterns
- raster
- scanning line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004364 calculation method Methods 0.000 claims description 10
- 238000011156 evaluation Methods 0.000 claims description 5
- 230000006870 function Effects 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000002194 synthesizing effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 11
- 238000007689 inspection Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013500 data storage Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60228634A JPS6289179A (ja) | 1985-10-16 | 1985-10-16 | パタ−ン発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60228634A JPS6289179A (ja) | 1985-10-16 | 1985-10-16 | パタ−ン発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6289179A JPS6289179A (ja) | 1987-04-23 |
| JPH0564392B2 true JPH0564392B2 (cs) | 1993-09-14 |
Family
ID=16879412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60228634A Granted JPS6289179A (ja) | 1985-10-16 | 1985-10-16 | パタ−ン発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6289179A (cs) |
-
1985
- 1985-10-16 JP JP60228634A patent/JPS6289179A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6289179A (ja) | 1987-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4744047A (en) | Pattern test apparatus including a plurality of pattern generators | |
| US4334274A (en) | Method of determining whether or not a region in a picture is within a closed boundary, and an apparatus therefor | |
| JPH0691003B2 (ja) | レチクル/マスクの検査方法とその検査装置 | |
| JPH02148180A (ja) | パターン検査方法及び装置 | |
| US4673816A (en) | Method for inspecting a pattern and an apparatus for inspecting a pattern | |
| JPH0564392B2 (cs) | ||
| JPH05181605A (ja) | 座標読み取り機能付き投影表示装置およびその表示スクリーンおよびその表示装置 | |
| JPH04250575A (ja) | 自動光学式検査システムで使用する多重許容範囲3状態データベースを発生するための方法と装置 | |
| JP2644724B2 (ja) | 文書画像傾き補正方法 | |
| JPS629954B2 (cs) | ||
| JPS5821110A (ja) | パタ−ン検査装置 | |
| JPS62102362A (ja) | パタ−ン発生方式 | |
| EP0381794B1 (en) | Method for registering image data | |
| JPS61108134A (ja) | マスク検査装置 | |
| JPH09101983A (ja) | 二次元回路パターンの発生方法及び発生装置 | |
| JPH07113975B2 (ja) | 重心検出装置 | |
| Chae et al. | Template-Set Approach to VLSI (Very Large Scale Integrated) Pattern Inspection | |
| JPS5939066B2 (ja) | パタ−ン正規化装置 | |
| JPH03273452A (ja) | アパーチャ軌跡データ作成システム | |
| JPH05300378A (ja) | 網点閾値発生方法 | |
| JP2780272B2 (ja) | 露光装置 | |
| JPH01188989A (ja) | 高精度位置認識方法 | |
| JPH07128026A (ja) | パターン検査装置 | |
| JPS6219980A (ja) | 画像処理装置 | |
| JPH08137087A (ja) | 露光データ処理方法 |