JPH056319B2 - - Google Patents

Info

Publication number
JPH056319B2
JPH056319B2 JP58175188A JP17518883A JPH056319B2 JP H056319 B2 JPH056319 B2 JP H056319B2 JP 58175188 A JP58175188 A JP 58175188A JP 17518883 A JP17518883 A JP 17518883A JP H056319 B2 JPH056319 B2 JP H056319B2
Authority
JP
Japan
Prior art keywords
film
insulating film
electrodes
transparent conductive
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58175188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6068590A (ja
Inventor
Masahiro Nishikawa
Jun Kuwata
Yosuke Fujita
Takao Toda
Tomizo Matsuoka
Atsushi Abe
Koji Nitsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58175188A priority Critical patent/JPS6068590A/ja
Publication of JPS6068590A publication Critical patent/JPS6068590A/ja
Publication of JPH056319B2 publication Critical patent/JPH056319B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP58175188A 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法 Granted JPS6068590A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58175188A JPS6068590A (ja) 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58175188A JPS6068590A (ja) 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6068590A JPS6068590A (ja) 1985-04-19
JPH056319B2 true JPH056319B2 (enFirst) 1993-01-26

Family

ID=15991819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58175188A Granted JPS6068590A (ja) 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6068590A (enFirst)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320461A (ja) * 1986-07-14 1988-01-28 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JP2773773B2 (ja) * 1989-02-23 1998-07-09 関西日本電気株式会社 薄膜ｅｌパネルの製造方法
GB0409521D0 (en) * 2004-04-29 2004-06-02 Fosroc International Ltd Sacrificial anode assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821795B2 (ja) * 1978-05-23 1983-05-04 シャープ株式会社 薄膜ｅｌ素子の構造

Also Published As

Publication number Publication date
JPS6068590A (ja) 1985-04-19

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