JPH0562923B2 - - Google Patents
Info
- Publication number
- JPH0562923B2 JPH0562923B2 JP7384087A JP7384087A JPH0562923B2 JP H0562923 B2 JPH0562923 B2 JP H0562923B2 JP 7384087 A JP7384087 A JP 7384087A JP 7384087 A JP7384087 A JP 7384087A JP H0562923 B2 JPH0562923 B2 JP H0562923B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- interference
- reflected
- interference light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003746 surface roughness Effects 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000005259 measurement Methods 0.000 claims description 17
- 230000008859 change Effects 0.000 claims description 16
- 230000010287 polarization Effects 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 5
- 230000010363 phase shift Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000012545 processing Methods 0.000 description 8
- 238000004439 roughness measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000691 measurement method Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000004298 light response Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7384087A JPS63238410A (ja) | 1987-03-26 | 1987-03-26 | 表面粗さ測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7384087A JPS63238410A (ja) | 1987-03-26 | 1987-03-26 | 表面粗さ測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63238410A JPS63238410A (ja) | 1988-10-04 |
| JPH0562923B2 true JPH0562923B2 (enrdf_load_html_response) | 1993-09-09 |
Family
ID=13529739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7384087A Granted JPS63238410A (ja) | 1987-03-26 | 1987-03-26 | 表面粗さ測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63238410A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19616245C2 (de) * | 1996-04-15 | 1998-06-18 | Zam Zentrum Fuer Angewandte Mi | Verfahren und Anordnung zum zerstörungsfreien, berührungslosen Prüfen und/oder Bewerten von Festkörpern, Flüssigkeiten, Gasen und Biomaterialien |
| KR100416497B1 (ko) * | 2001-05-03 | 2004-01-31 | (주) 인펙 | 박막패턴 검사장치 |
-
1987
- 1987-03-26 JP JP7384087A patent/JPS63238410A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63238410A (ja) | 1988-10-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |