JPH0560494B2 - - Google Patents

Info

Publication number
JPH0560494B2
JPH0560494B2 JP16943386A JP16943386A JPH0560494B2 JP H0560494 B2 JPH0560494 B2 JP H0560494B2 JP 16943386 A JP16943386 A JP 16943386A JP 16943386 A JP16943386 A JP 16943386A JP H0560494 B2 JPH0560494 B2 JP H0560494B2
Authority
JP
Japan
Prior art keywords
low
temperature plasma
reactor
electrode
shield wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16943386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327537A (ja
Inventor
Tokuki Goto
Yoshikazu Santo
Hiroshi Ishidoshiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sando Iron Works Co Ltd
Unitika Ltd
Original Assignee
Sando Iron Works Co Ltd
Unitika Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sando Iron Works Co Ltd, Unitika Ltd filed Critical Sando Iron Works Co Ltd
Priority to JP16943386A priority Critical patent/JPS6327537A/ja
Priority to US07/071,889 priority patent/US4829189A/en
Priority to DE19873723865 priority patent/DE3723865A1/de
Publication of JPS6327537A publication Critical patent/JPS6327537A/ja
Publication of JPH0560494B2 publication Critical patent/JPH0560494B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP16943386A 1986-07-18 1986-07-18 低温プラズマ処理装置における給電構造 Granted JPS6327537A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP16943386A JPS6327537A (ja) 1986-07-18 1986-07-18 低温プラズマ処理装置における給電構造
US07/071,889 US4829189A (en) 1986-07-18 1987-07-10 Apparatus for low-temperature plasma treatment of sheet material
DE19873723865 DE3723865A1 (de) 1986-07-18 1987-07-18 Reaktor fuer eine plasmabehandlung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16943386A JPS6327537A (ja) 1986-07-18 1986-07-18 低温プラズマ処理装置における給電構造

Publications (2)

Publication Number Publication Date
JPS6327537A JPS6327537A (ja) 1988-02-05
JPH0560494B2 true JPH0560494B2 (cg-RX-API-DMAC7.html) 1993-09-02

Family

ID=15886505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16943386A Granted JPS6327537A (ja) 1986-07-18 1986-07-18 低温プラズマ処理装置における給電構造

Country Status (1)

Country Link
JP (1) JPS6327537A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS6327537A (ja) 1988-02-05

Similar Documents

Publication Publication Date Title
CN105580128B (zh) 具有射频施加器的可旋转的基板支撑件
JP2002339070A (ja) Ｃｖｄ反応室を洗浄する高周波プラズマ装置
WO1998042012A1 (en) Method and device for plasma treatment
JPS59100516A (ja) 光電池素子の製造装置及びアセンブリ
US20120080422A1 (en) Apparatus for making hot water using carbon heater
JPS5843875B2 (ja) 高周波加熱装置用ヒ−タ装置
US4829189A (en) Apparatus for low-temperature plasma treatment of sheet material
US4882129A (en) Ozone generator cell
JPH0560494B2 (cg-RX-API-DMAC7.html)
KR100871896B1 (ko) 전자파 소멸기능을 갖는 직수식 온수히터
CA2958400C (en) Microwave wire mesh oven
EA024404B1 (ru) Электрод для плазменной обработки диэлектрическим барьерным разрядом
CN113099599A (zh) 一种滑动弧放电反应装置及杀菌方法
JPH10241893A (ja) マイクロ波プラズマ発生装置
CN216760878U (zh) 一种薄膜电晕装置
CN212013083U (zh) 一种石墨烯工业电热膜
CN209759571U (zh) 蒸发源加热电导入装置及真空蒸发镀膜设备
CN110517974A (zh) 半导体或光伏材料的新型加工设备
CN219778139U (zh) 一种用于半导体设备的板状温度控制装置
CN223688451U (zh) 反应炉及镀膜设备
JP2502632B2 (ja) 低温プラズマ処理装置
JP2701242B2 (ja) プラズマｃｖｄ装置用電極構造
CN208657101U (zh) 一种便携式互感器保温装置
JP3269904B2 (ja) 進行波管用電源装置
JP2000164324A (ja) 水冷電極