JPH0560256B2 - - Google Patents

Info

Publication number
JPH0560256B2
JPH0560256B2 JP60168956A JP16895685A JPH0560256B2 JP H0560256 B2 JPH0560256 B2 JP H0560256B2 JP 60168956 A JP60168956 A JP 60168956A JP 16895685 A JP16895685 A JP 16895685A JP H0560256 B2 JPH0560256 B2 JP H0560256B2
Authority
JP
Japan
Prior art keywords
electrode
sample
container
gas
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60168956A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230329A (ja
Inventor
Tsunetoshi Arikado
Haruaki Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Mechatronics Corp
Original Assignee
Toshiba Corp
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Shibaura Engineering Works Co Ltd filed Critical Toshiba Corp
Priority to JP16895685A priority Critical patent/JPS6230329A/ja
Publication of JPS6230329A publication Critical patent/JPS6230329A/ja
Publication of JPH0560256B2 publication Critical patent/JPH0560256B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP16895685A 1985-07-31 1985-07-31 ドライエツチング装置 Granted JPS6230329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16895685A JPS6230329A (ja) 1985-07-31 1985-07-31 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16895685A JPS6230329A (ja) 1985-07-31 1985-07-31 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS6230329A JPS6230329A (ja) 1987-02-09
JPH0560256B2 true JPH0560256B2 (OSRAM) 1993-09-01

Family

ID=15877669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16895685A Granted JPS6230329A (ja) 1985-07-31 1985-07-31 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS6230329A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111835A (ja) * 1991-12-10 1995-05-02 Toho Leo Kk 樹木の支持施工方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179421A (ja) * 1988-01-06 1989-07-17 Tokuda Seisakusho Ltd 放電電極
JP2804037B2 (ja) * 1988-02-05 1998-09-24 株式会社東芝 ドライエッチング方法
JPH02121330A (ja) * 1988-10-31 1990-05-09 Hitachi Ltd プラズマ処理方法及び装置
JPH02268429A (ja) * 1989-04-11 1990-11-02 Tokyo Electron Ltd プラズマエッチング装置
JPH03167825A (ja) * 1989-11-28 1991-07-19 Matsushita Electric Ind Co Ltd エッチング装置およびエッチング方法
US5798016A (en) * 1994-03-08 1998-08-25 International Business Machines Corporation Apparatus for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056431B2 (ja) * 1980-10-09 1985-12-10 三菱電機株式会社 プラズマエツチング装置
JPS58153332A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp ドライエツチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111835A (ja) * 1991-12-10 1995-05-02 Toho Leo Kk 樹木の支持施工方法

Also Published As

Publication number Publication date
JPS6230329A (ja) 1987-02-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term