JPH0558565B2 - - Google Patents

Info

Publication number
JPH0558565B2
JPH0558565B2 JP59236740A JP23674084A JPH0558565B2 JP H0558565 B2 JPH0558565 B2 JP H0558565B2 JP 59236740 A JP59236740 A JP 59236740A JP 23674084 A JP23674084 A JP 23674084A JP H0558565 B2 JPH0558565 B2 JP H0558565B2
Authority
JP
Japan
Prior art keywords
gas
substrate
rare gas
resonance
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59236740A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61115328A (ja
Inventor
Junichi Takahashi
Michiharu Tanabe
Masahiko Maeda
Yutaka Sakakibara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59236740A priority Critical patent/JPS61115328A/ja
Publication of JPS61115328A publication Critical patent/JPS61115328A/ja
Publication of JPH0558565B2 publication Critical patent/JPH0558565B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP59236740A 1984-11-12 1984-11-12 半導体製造方法 Granted JPS61115328A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59236740A JPS61115328A (ja) 1984-11-12 1984-11-12 半導体製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59236740A JPS61115328A (ja) 1984-11-12 1984-11-12 半導体製造方法

Publications (2)

Publication Number Publication Date
JPS61115328A JPS61115328A (ja) 1986-06-02
JPH0558565B2 true JPH0558565B2 (enExample) 1993-08-26

Family

ID=17005080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59236740A Granted JPS61115328A (ja) 1984-11-12 1984-11-12 半導体製造方法

Country Status (1)

Country Link
JP (1) JPS61115328A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932122A (ja) * 1982-08-16 1984-02-21 Hitachi Ltd 表面改質装置

Also Published As

Publication number Publication date
JPS61115328A (ja) 1986-06-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term