JPH0557555B2 - - Google Patents

Info

Publication number
JPH0557555B2
JPH0557555B2 JP62213376A JP21337687A JPH0557555B2 JP H0557555 B2 JPH0557555 B2 JP H0557555B2 JP 62213376 A JP62213376 A JP 62213376A JP 21337687 A JP21337687 A JP 21337687A JP H0557555 B2 JPH0557555 B2 JP H0557555B2
Authority
JP
Japan
Prior art keywords
stage
mask
tilting
hinge
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62213376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6454392A (en
Inventor
Joji Iwata
Ryoji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62213376A priority Critical patent/JPS6454392A/ja
Publication of JPS6454392A publication Critical patent/JPS6454392A/ja
Publication of JPH0557555B2 publication Critical patent/JPH0557555B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62213376A 1987-08-26 1987-08-26 Flap stage Granted JPS6454392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213376A JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213376A JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Publications (2)

Publication Number Publication Date
JPS6454392A JPS6454392A (en) 1989-03-01
JPH0557555B2 true JPH0557555B2 (cg-RX-API-DMAC7.html) 1993-08-24

Family

ID=16638166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213376A Granted JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Country Status (1)

Country Link
JP (1) JPS6454392A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006000352A1 (de) 2004-06-29 2006-01-05 Carl Zeiss Smt Ag Positioniereinheit und vorrichtung zur justage für ein optisches element
JPWO2012115002A1 (ja) * 2011-02-22 2014-07-07 株式会社ニコン 保持装置、露光装置、及びデバイスの製造方法
CN107636106B (zh) 2015-06-15 2019-09-10 株式会社寺冈制作所 粘着剂组合物和粘着带

Also Published As

Publication number Publication date
JPS6454392A (en) 1989-03-01

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