JPH0557329B2 - - Google Patents

Info

Publication number
JPH0557329B2
JPH0557329B2 JP63148342A JP14834288A JPH0557329B2 JP H0557329 B2 JPH0557329 B2 JP H0557329B2 JP 63148342 A JP63148342 A JP 63148342A JP 14834288 A JP14834288 A JP 14834288A JP H0557329 B2 JPH0557329 B2 JP H0557329B2
Authority
JP
Japan
Prior art keywords
laser
polygon mirror
mirror
laser beam
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63148342A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01316415A (ja
Inventor
Motoi Kido
Shinsuke Nakanishi
Katsuhiro Minamida
Hiromichi Kawasumi
Norio Ikenaga
Osami Ichiko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP63148342A priority Critical patent/JPH01316415A/ja
Publication of JPH01316415A publication Critical patent/JPH01316415A/ja
Publication of JPH0557329B2 publication Critical patent/JPH0557329B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP63148342A 1988-06-17 1988-06-17 ポリゴンミラーを用いたレーザ熱処理装置及び方法 Granted JPH01316415A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63148342A JPH01316415A (ja) 1988-06-17 1988-06-17 ポリゴンミラーを用いたレーザ熱処理装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63148342A JPH01316415A (ja) 1988-06-17 1988-06-17 ポリゴンミラーを用いたレーザ熱処理装置及び方法

Publications (2)

Publication Number Publication Date
JPH01316415A JPH01316415A (ja) 1989-12-21
JPH0557329B2 true JPH0557329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-23

Family

ID=15450626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63148342A Granted JPH01316415A (ja) 1988-06-17 1988-06-17 ポリゴンミラーを用いたレーザ熱処理装置及び方法

Country Status (1)

Country Link
JP (1) JPH01316415A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2643031B2 (ja) * 1991-04-10 1997-08-20 動力炉・核燃料開発事業団 固体発光分光分析装置
AU2002311597A1 (en) * 2001-06-13 2002-12-23 Orbotech Ltd. Multi-beam micro-machining system and method
DE10154508A1 (de) † 2001-11-07 2003-05-22 Mlt Micro Laser Technology Gmb Vorrichtung zur Substratbehandlung mittels Laserstrahlung
KR100462359B1 (ko) 2004-08-18 2004-12-17 주식회사 이오테크닉스 폴리곤 미러를 이용한 레이저 가공장치 및 방법
KR100709171B1 (ko) * 2005-11-08 2007-04-18 주식회사 이오테크닉스 레이저 빔 분할을 이용한 레이저 가공 장치
JP2008267598A (ja) * 2007-03-23 2008-11-06 Yamaha Motor Co Ltd クランクシャフト、内燃機関、輸送機器およびクランクシャフトの製造方法
CN102612420A (zh) * 2009-11-19 2012-07-25 深圳市大族激光科技股份有限公司 多头激光加工方法及其装置
CN101804518A (zh) * 2010-04-02 2010-08-18 苏州市博海激光科技有限公司 多激光器并联式卷烟接装纸激光打孔方法及设备
JP5931341B2 (ja) * 2011-02-04 2016-06-08 三菱重工業株式会社 溶接方法
DE102016215847A1 (de) * 2016-08-23 2018-03-01 Carl Zeiss Microscopy Gmbh Spiegelturm, Anordnung mit Spiegelturm und Mikroskop
US10981323B2 (en) 2017-05-26 2021-04-20 Applied Materials, Inc. Energy delivery with rotating polygon and multiple light beams on same path for additive manufacturing
US10940641B2 (en) 2017-05-26 2021-03-09 Applied Materials, Inc. Multi-light beam energy delivery with rotating polygon for additive manufacturing
US11065689B2 (en) * 2017-06-23 2021-07-20 Applied Materials, Inc. Additive manufacturing with polygon and galvo mirror scanners
JP2021523293A (ja) 2018-05-09 2021-09-02 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ ポリゴンスキャナを用いた付加製造
CN110434470B (zh) * 2019-07-04 2020-06-12 中国科学院西安光学精密机械研究所 一种大幅面透明曲面零件减反功能微纳结构加工方法及系统
KR102703790B1 (ko) * 2021-10-22 2024-09-06 에이치씨에스테크놀로지 주식회사 정밀 패터닝을 위한 레이저 롤 패터닝 장치
CN116604176A (zh) * 2023-06-28 2023-08-18 济南森峰激光科技股份有限公司 一种三维五轴切割头专用调光方法

Also Published As

Publication number Publication date
JPH01316415A (ja) 1989-12-21

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