CN110434470B - 一种大幅面透明曲面零件减反功能微纳结构加工方法及系统 - Google Patents
一种大幅面透明曲面零件减反功能微纳结构加工方法及系统 Download PDFInfo
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- CN110434470B CN110434470B CN201910600292.5A CN201910600292A CN110434470B CN 110434470 B CN110434470 B CN 110434470B CN 201910600292 A CN201910600292 A CN 201910600292A CN 110434470 B CN110434470 B CN 110434470B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
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Abstract
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CN201910600292.5A CN110434470B (zh) | 2019-07-04 | 2019-07-04 | 一种大幅面透明曲面零件减反功能微纳结构加工方法及系统 |
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CN201910600292.5A CN110434470B (zh) | 2019-07-04 | 2019-07-04 | 一种大幅面透明曲面零件减反功能微纳结构加工方法及系统 |
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CN110434470A CN110434470A (zh) | 2019-11-12 |
CN110434470B true CN110434470B (zh) | 2020-06-12 |
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CN111055030A (zh) * | 2019-12-20 | 2020-04-24 | 武汉华工激光工程有限责任公司 | 一种光束指向稳定性监测与反馈装置及方法 |
CN111438438B (zh) * | 2020-01-15 | 2024-07-26 | 长沙昆仑精密科技有限公司 | 一种激光高效大面积动态干涉加工装置及方法 |
CN112192030B (zh) * | 2020-09-07 | 2021-07-27 | 中国科学院西安光学精密机械研究所 | 一种阵列增透减反功能的微纳结构加工方法及系统 |
CN112388158A (zh) * | 2020-10-29 | 2021-02-23 | 青岛理工大学 | 用于球面微结构的全息飞秒激光分层并行加工方法及系统 |
CN112452953B (zh) * | 2020-11-19 | 2023-04-11 | 哈尔滨工大焊接科技有限公司 | 智能激光清洗工作头 |
CN112630983A (zh) * | 2020-12-24 | 2021-04-09 | 中国工程物理研究院激光聚变研究中心 | 一种激光系统、激光诱导损伤测试系统及方法 |
CN114769909B (zh) * | 2022-06-21 | 2022-11-18 | 武汉光谷航天三江激光产业技术研究院有限公司 | 基于功率实时监测校准的晶圆激光隐形切割系统及方法 |
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JPH01316415A (ja) * | 1988-06-17 | 1989-12-21 | Nippon Steel Corp | ポリゴンミラーを用いたレーザ熱処理装置及び方法 |
CN102508365B (zh) * | 2011-11-01 | 2013-11-06 | 浙江大学 | 一种光束漂移实时自动校正补偿的方法和装置 |
DE102012002470A1 (de) * | 2012-02-03 | 2013-08-08 | Iai Industrial Systems B.V. | CO2-Laser mit schneller Leistungssteuerung |
CN104668785A (zh) * | 2015-03-10 | 2015-06-03 | 苏州德龙激光股份有限公司 | 激光快速打孔的装置及其方法 |
CN206305608U (zh) * | 2016-10-18 | 2017-07-07 | 武汉华工激光工程有限责任公司 | 一种激光功率和光路的调节装置 |
CN108413867B (zh) * | 2017-04-18 | 2020-08-04 | 北京理工大学 | 激光微纳加工分光瞳差动共焦在线监测一体化方法与装置 |
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