JPH0555258B2 - - Google Patents
Info
- Publication number
- JPH0555258B2 JPH0555258B2 JP24455884A JP24455884A JPH0555258B2 JP H0555258 B2 JPH0555258 B2 JP H0555258B2 JP 24455884 A JP24455884 A JP 24455884A JP 24455884 A JP24455884 A JP 24455884A JP H0555258 B2 JPH0555258 B2 JP H0555258B2
- Authority
- JP
- Japan
- Prior art keywords
- indexing
- cutting feed
- main body
- sliding guide
- guide shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002131 composite material Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 description 8
- 238000003754 machining Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59244558A JPS61125749A (ja) | 1984-11-21 | 1984-11-21 | 複合テ−ブル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59244558A JPS61125749A (ja) | 1984-11-21 | 1984-11-21 | 複合テ−ブル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61125749A JPS61125749A (ja) | 1986-06-13 |
JPH0555258B2 true JPH0555258B2 (nl) | 1993-08-16 |
Family
ID=17120494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59244558A Granted JPS61125749A (ja) | 1984-11-21 | 1984-11-21 | 複合テ−ブル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61125749A (nl) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4319905C2 (de) * | 1993-06-16 | 1999-01-14 | Chiron Werke Gmbh | Werkzeugmaschine, insbesondere Langbett-Werkzeugmaschine |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5617341A (en) * | 1979-07-23 | 1981-02-19 | Nippon Telegr & Teleph Corp <Ntt> | Alignment stage for step and repeat exposure |
-
1984
- 1984-11-21 JP JP59244558A patent/JPS61125749A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5617341A (en) * | 1979-07-23 | 1981-02-19 | Nippon Telegr & Teleph Corp <Ntt> | Alignment stage for step and repeat exposure |
Also Published As
Publication number | Publication date |
---|---|
JPS61125749A (ja) | 1986-06-13 |
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