JPH0553377B2 - - Google Patents
Info
- Publication number
- JPH0553377B2 JPH0553377B2 JP63202472A JP20247288A JPH0553377B2 JP H0553377 B2 JPH0553377 B2 JP H0553377B2 JP 63202472 A JP63202472 A JP 63202472A JP 20247288 A JP20247288 A JP 20247288A JP H0553377 B2 JPH0553377 B2 JP H0553377B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- partition
- test method
- substance
- gas permeation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 claims description 94
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical group [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 44
- 239000000126 substance Substances 0.000 claims description 28
- 238000012360 testing method Methods 0.000 claims description 24
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 23
- 239000005977 Ethylene Substances 0.000 claims description 23
- 238000005192 partition Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 21
- HWYHZTIRURJOHG-UHFFFAOYSA-N luminol Chemical compound O=C1NNC(=O)C2=C1C(N)=CC=C2 HWYHZTIRURJOHG-UHFFFAOYSA-N 0.000 claims description 16
- 238000010998 test method Methods 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 11
- 239000012159 carrier gas Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004377 microelectronic Methods 0.000 claims description 6
- 238000005057 refrigeration Methods 0.000 claims description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- 150000001336 alkenes Chemical class 0.000 claims description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims description 5
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 5
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 claims description 5
- 239000012528 membrane Substances 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 238000004020 luminiscence type Methods 0.000 description 9
- 239000011261 inert gas Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- 239000012466 permeate Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical group C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 230000005587 bubbling Effects 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 239000002828 fuel tank Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000004663 dialkyl amino group Chemical group 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012510 hollow fiber Substances 0.000 description 1
- 239000000543 intermediate Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003094 microcapsule Substances 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920006280 packaging film Polymers 0.000 description 1
- 239000012785 packaging film Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 239000004627 regenerated cellulose Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20247288A JPH0251043A (ja) | 1988-08-11 | 1988-08-11 | 隔体の気体透過試験方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20247288A JPH0251043A (ja) | 1988-08-11 | 1988-08-11 | 隔体の気体透過試験方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0251043A JPH0251043A (ja) | 1990-02-21 |
| JPH0553377B2 true JPH0553377B2 (fr) | 1993-08-09 |
Family
ID=16458087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20247288A Granted JPH0251043A (ja) | 1988-08-11 | 1988-08-11 | 隔体の気体透過試験方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0251043A (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2777755B2 (ja) * | 1991-05-20 | 1998-07-23 | 内外マリアブル株式会社 | マグネシウム反応確認法 |
| DE69409736T2 (de) * | 1993-08-30 | 1998-10-01 | Millipore Invest Holdings | Prüfung der Unversehrtheit poröser Strukturen mittels Schallemission |
| US7587927B2 (en) * | 2006-11-14 | 2009-09-15 | Millipore Corporation | Rapid integrity testing of porous materials |
| US8691071B2 (en) * | 2008-05-02 | 2014-04-08 | Mocon, Inc. | Coulometric analyte sensing instrument with an analyte-consuming sensor in a closed cell |
| JP5385196B2 (ja) * | 2010-03-31 | 2014-01-08 | 富士フイルム株式会社 | 酸素透過量の測定方法及び測定装置 |
| JP5307754B2 (ja) * | 2010-03-31 | 2013-10-02 | 富士フイルム株式会社 | 酸素バリア体の欠陥検出方法及び装置 |
| US8647876B2 (en) | 2010-03-31 | 2014-02-11 | Fujifilm Corporation | Oxygen permeability measuring apparatus and method, and defect inspection apparatus and method |
| CN104777084B (zh) * | 2015-03-23 | 2018-02-16 | 中山大学 | 一种基于锁相放大器的气体透过率光学测量方法及系统 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916513A (fr) * | 1972-04-17 | 1974-02-14 | ||
| JPS553702A (en) * | 1978-05-30 | 1980-01-11 | Kazuo Tsubone | Chemically illuminating float |
| JPS5861446A (ja) * | 1981-10-07 | 1983-04-12 | Fuji Photo Film Co Ltd | 過酸化水素の定量方法 |
| JPS60149950A (ja) * | 1984-01-17 | 1985-08-07 | Hitachi Ltd | ケミルミネツセントの検出法 |
-
1988
- 1988-08-11 JP JP20247288A patent/JPH0251043A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916513A (fr) * | 1972-04-17 | 1974-02-14 | ||
| JPS553702A (en) * | 1978-05-30 | 1980-01-11 | Kazuo Tsubone | Chemically illuminating float |
| JPS5861446A (ja) * | 1981-10-07 | 1983-04-12 | Fuji Photo Film Co Ltd | 過酸化水素の定量方法 |
| JPS60149950A (ja) * | 1984-01-17 | 1985-08-07 | Hitachi Ltd | ケミルミネツセントの検出法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0251043A (ja) | 1990-02-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |