JPH0552051B2 - - Google Patents

Info

Publication number
JPH0552051B2
JPH0552051B2 JP62046752A JP4675287A JPH0552051B2 JP H0552051 B2 JPH0552051 B2 JP H0552051B2 JP 62046752 A JP62046752 A JP 62046752A JP 4675287 A JP4675287 A JP 4675287A JP H0552051 B2 JPH0552051 B2 JP H0552051B2
Authority
JP
Japan
Prior art keywords
wavelength
optical system
laser light
imaging optical
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62046752A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63213928A (ja
Inventor
Masato Aketagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62046752A priority Critical patent/JPS63213928A/ja
Publication of JPS63213928A publication Critical patent/JPS63213928A/ja
Priority to US07/550,194 priority patent/US5095190A/en
Publication of JPH0552051B2 publication Critical patent/JPH0552051B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62046752A 1987-03-03 1987-03-03 露光装置 Granted JPS63213928A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62046752A JPS63213928A (ja) 1987-03-03 1987-03-03 露光装置
US07/550,194 US5095190A (en) 1987-03-03 1990-07-10 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62046752A JPS63213928A (ja) 1987-03-03 1987-03-03 露光装置

Publications (2)

Publication Number Publication Date
JPS63213928A JPS63213928A (ja) 1988-09-06
JPH0552051B2 true JPH0552051B2 (enExample) 1993-08-04

Family

ID=12756061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62046752A Granted JPS63213928A (ja) 1987-03-03 1987-03-03 露光装置

Country Status (1)

Country Link
JP (1) JPS63213928A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590891B2 (ja) * 1987-07-02 1997-03-12 株式会社ニコン 投影光学装置
JPH0628227B2 (ja) * 1987-10-06 1994-04-13 株式会社日立製作所 半導体露光装置
JPH01106426A (ja) * 1987-10-19 1989-04-24 Canon Inc 露光装置
JP2894914B2 (ja) * 1993-01-27 1999-05-24 日本電気株式会社 投影露光方法および装置
KR100630703B1 (ko) 2004-10-15 2006-10-02 삼성전자주식회사 레이저빔의 파장 제어 시스템 및 그 제어방법
WO2022064594A1 (ja) * 2020-09-24 2022-03-31 ギガフォトン株式会社 電子デバイスの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214334A (ja) * 1984-04-11 1985-10-26 Canon Inc 投影露光装置及び投影露光方法
JPS61181128A (ja) * 1985-02-06 1986-08-13 Canon Inc 投影露光装置及び投影露光方法
JPS60214335A (ja) * 1984-04-11 1985-10-26 Canon Inc 投影露光装置及び投影露光方法

Also Published As

Publication number Publication date
JPS63213928A (ja) 1988-09-06

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