JPH0551661B2 - - Google Patents

Info

Publication number
JPH0551661B2
JPH0551661B2 JP61039640A JP3964086A JPH0551661B2 JP H0551661 B2 JPH0551661 B2 JP H0551661B2 JP 61039640 A JP61039640 A JP 61039640A JP 3964086 A JP3964086 A JP 3964086A JP H0551661 B2 JPH0551661 B2 JP H0551661B2
Authority
JP
Japan
Prior art keywords
base material
hoop
tin film
substrate
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61039640A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62199763A (ja
Inventor
Takahiro Myano
Keimei Kitamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP3964086A priority Critical patent/JPS62199763A/ja
Publication of JPS62199763A publication Critical patent/JPS62199763A/ja
Publication of JPH0551661B2 publication Critical patent/JPH0551661B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3964086A 1986-02-25 1986-02-25 ＴｉＮ膜の形成法 Granted JPS62199763A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3964086A JPS62199763A (ja) 1986-02-25 1986-02-25 ＴｉＮ膜の形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3964086A JPS62199763A (ja) 1986-02-25 1986-02-25 ＴｉＮ膜の形成法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1236361A Division JPH0686657B2 (ja) 1989-09-11 1989-09-11 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS62199763A JPS62199763A (ja) 1987-09-03
JPH0551661B2 true JPH0551661B2 (cg-RX-API-DMAC7.html) 1993-08-03

Family

ID=12558688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3964086A Granted JPS62199763A (ja) 1986-02-25 1986-02-25 ＴｉＮ膜の形成法

Country Status (1)

Country Link
JP (1) JPS62199763A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2611309B2 (ja) * 1988-02-23 1997-05-21 日新電機株式会社 高硬度ＴｉＮ膜の製造方法
JPH03177570A (ja) * 1989-12-05 1991-08-01 Raimuzu:Kk 複合硬質材料の製造方法
CN111893439A (zh) * 2020-08-11 2020-11-06 苏州众智泽智能科技有限公司 具有氮化钛硬质涂层的个人饰品的制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181864A (ja) * 1982-04-16 1983-10-24 Sumitomo Electric Ind Ltd 表面処理方法
JPS6115967A (ja) * 1984-06-29 1986-01-24 Sumitomo Electric Ind Ltd 表面処理方法
JPS61195971A (ja) * 1985-02-25 1986-08-30 Kobe Steel Ltd 耐摩耗性皮膜の形成方法

Also Published As

Publication number Publication date
JPS62199763A (ja) 1987-09-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term