JPH0549930B2 - - Google Patents

Info

Publication number
JPH0549930B2
JPH0549930B2 JP56138154A JP13815481A JPH0549930B2 JP H0549930 B2 JPH0549930 B2 JP H0549930B2 JP 56138154 A JP56138154 A JP 56138154A JP 13815481 A JP13815481 A JP 13815481A JP H0549930 B2 JPH0549930 B2 JP H0549930B2
Authority
JP
Japan
Prior art keywords
light
optical sensor
sample
amount
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56138154A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5839915A (ja
Inventor
Nobuyuki Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13815481A priority Critical patent/JPS5839915A/ja
Publication of JPS5839915A publication Critical patent/JPS5839915A/ja
Publication of JPH0549930B2 publication Critical patent/JPH0549930B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP13815481A 1981-09-02 1981-09-02 光センサ分光感度測定装置 Granted JPS5839915A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13815481A JPS5839915A (ja) 1981-09-02 1981-09-02 光センサ分光感度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13815481A JPS5839915A (ja) 1981-09-02 1981-09-02 光センサ分光感度測定装置

Publications (2)

Publication Number Publication Date
JPS5839915A JPS5839915A (ja) 1983-03-08
JPH0549930B2 true JPH0549930B2 (enExample) 1993-07-27

Family

ID=15215277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13815481A Granted JPS5839915A (ja) 1981-09-02 1981-09-02 光センサ分光感度測定装置

Country Status (1)

Country Link
JP (1) JPS5839915A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621273B2 (ja) * 1986-05-07 1994-03-23 神東塗料株式会社 耐候性鋼の錆安定化表面処理法
JP3524790B2 (ja) 1998-09-30 2004-05-10 株式会社神戸製鋼所 塗膜耐久性に優れた塗装用鋼材およびその製造方法
JP2011196750A (ja) * 2010-03-18 2011-10-06 Seiko Epson Corp 分光感度特性測定装置、および分光感度特性測定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890578A (enExample) * 1972-03-03 1973-11-26
JPS5581320A (en) * 1978-12-16 1980-06-19 Toshiba Corp Optical information reader

Also Published As

Publication number Publication date
JPS5839915A (ja) 1983-03-08

Similar Documents

Publication Publication Date Title
US5486701A (en) Method and apparatus for measuring reflectance in two wavelength bands to enable determination of thin film thickness
US6115107A (en) Exposure apparatus
KR100571863B1 (ko) 대상물의 막 두께를 측정하는 장치, 대상물의분광반사율을 측정하는 장치 및 방법과, 대상물상의이물을 검사하는 장치 및 방법
US5604594A (en) Device and method for determining the color value of a light
JPH01308930A (ja) 顕微分光装置
EP1111333A1 (en) Light source device, spectroscope comprising the light source device, and film thickness sensor
JPS634650B2 (enExample)
JPS59120939A (ja) 薄層クロマトグラムの定量的評価装置
JPH0549930B2 (enExample)
EP0440443A2 (en) Multispectral reflectometer
JP3792273B2 (ja) 分光測定装置
US6856395B2 (en) Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner
US5160981A (en) Method of measuring the reflection density of an image
JPH0515976B2 (enExample)
US5262840A (en) Multispectral reflectometer
JPS6175203A (ja) 膜厚測定装置
Missalla et al. Metrology tools for EUV-source characterization and optimization
US5323230A (en) Method of measuring the reflection density of an image
WO2002012950A1 (en) Method of analyzing spectrum using multi-slit member and multi-channel spectrograph using the same
JP3216506B2 (ja) 測定領域確認機能付き光学特性測定装置
JPH08159876A (ja) 分光測定装置
JPS61107104A (ja) 微細パタ−ン深さ測定方法及びその装置
JP2006300808A (ja) ラマン分光測定装置
JPS61223604A (ja) ギヤツプ測定装置
JPS63159736A (ja) ウランまたはプルトニウムの濃度測定方法