JPH0549636B2 - - Google Patents

Info

Publication number
JPH0549636B2
JPH0549636B2 JP1136065A JP13606589A JPH0549636B2 JP H0549636 B2 JPH0549636 B2 JP H0549636B2 JP 1136065 A JP1136065 A JP 1136065A JP 13606589 A JP13606589 A JP 13606589A JP H0549636 B2 JPH0549636 B2 JP H0549636B2
Authority
JP
Japan
Prior art keywords
chamber
load lock
lock chamber
samples
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1136065A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035395A (ja
Inventor
Naoyuki Tamura
Kazuaki Ichihashi
Tatsuo Moroi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Kasado Mechanics Co Ld
Original Assignee
Hitachi Ltd
Hitachi Kasado Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Kasado Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP1136065A priority Critical patent/JPH035395A/ja
Publication of JPH035395A publication Critical patent/JPH035395A/ja
Publication of JPH0549636B2 publication Critical patent/JPH0549636B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1136065A 1989-05-31 1989-05-31 Ｍｂｅ装置及びその運転方法 Granted JPH035395A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1136065A JPH035395A (ja) 1989-05-31 1989-05-31 Ｍｂｅ装置及びその運転方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1136065A JPH035395A (ja) 1989-05-31 1989-05-31 Ｍｂｅ装置及びその運転方法

Publications (2)

Publication Number Publication Date
JPH035395A JPH035395A (ja) 1991-01-11
JPH0549636B2 true JPH0549636B2 (enExample) 1993-07-26

Family

ID=15166391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1136065A Granted JPH035395A (ja) 1989-05-31 1989-05-31 Ｍｂｅ装置及びその運転方法

Country Status (1)

Country Link
JP (1) JPH035395A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615031A (en) * 1979-07-17 1981-02-13 Matsushita Electric Ind Co Ltd Molecular beam epitaxial growing apparatus
JPS6015917A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 分子線エピタキシ装置

Also Published As

Publication number Publication date
JPH035395A (ja) 1991-01-11

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