JPH0548612B2 - - Google Patents
Info
- Publication number
- JPH0548612B2 JPH0548612B2 JP59079085A JP7908584A JPH0548612B2 JP H0548612 B2 JPH0548612 B2 JP H0548612B2 JP 59079085 A JP59079085 A JP 59079085A JP 7908584 A JP7908584 A JP 7908584A JP H0548612 B2 JPH0548612 B2 JP H0548612B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- wavelength
- mask pattern
- chromatic aberration
- projection optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 59
- 230000004075 alteration Effects 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 6
- 238000005286 illumination Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59079085A JPS60222862A (ja) | 1984-04-19 | 1984-04-19 | 露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59079085A JPS60222862A (ja) | 1984-04-19 | 1984-04-19 | 露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60222862A JPS60222862A (ja) | 1985-11-07 |
| JPH0548612B2 true JPH0548612B2 (enrdf_load_stackoverflow) | 1993-07-22 |
Family
ID=13680042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59079085A Granted JPS60222862A (ja) | 1984-04-19 | 1984-04-19 | 露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60222862A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0669014B2 (ja) * | 1986-02-24 | 1994-08-31 | 株式会社ニコン | 露光装置 |
| JP2650895B2 (ja) * | 1986-07-02 | 1997-09-10 | 松下電器産業株式会社 | 露光装置および露光方法 |
-
1984
- 1984-04-19 JP JP59079085A patent/JPS60222862A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60222862A (ja) | 1985-11-07 |
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