JPH0548085Y2 - - Google Patents
Info
- Publication number
- JPH0548085Y2 JPH0548085Y2 JP12094988U JP12094988U JPH0548085Y2 JP H0548085 Y2 JPH0548085 Y2 JP H0548085Y2 JP 12094988 U JP12094988 U JP 12094988U JP 12094988 U JP12094988 U JP 12094988U JP H0548085 Y2 JPH0548085 Y2 JP H0548085Y2
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- diffraction image
- imaging device
- control
- axis moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003384 imaging method Methods 0.000 claims description 40
- 238000001514 detection method Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094988U JPH0548085Y2 (US06272168-20010807-M00014.png) | 1988-09-14 | 1988-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094988U JPH0548085Y2 (US06272168-20010807-M00014.png) | 1988-09-14 | 1988-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0243606U JPH0243606U (US06272168-20010807-M00014.png) | 1990-03-26 |
| JPH0548085Y2 true JPH0548085Y2 (US06272168-20010807-M00014.png) | 1993-12-20 |
Family
ID=31367518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12094988U Expired - Lifetime JPH0548085Y2 (US06272168-20010807-M00014.png) | 1988-09-14 | 1988-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548085Y2 (US06272168-20010807-M00014.png) |
-
1988
- 1988-09-14 JP JP12094988U patent/JPH0548085Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0243606U (US06272168-20010807-M00014.png) | 1990-03-26 |
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