JPH0547275B2 - - Google Patents
Info
- Publication number
- JPH0547275B2 JPH0547275B2 JP62036543A JP3654387A JPH0547275B2 JP H0547275 B2 JPH0547275 B2 JP H0547275B2 JP 62036543 A JP62036543 A JP 62036543A JP 3654387 A JP3654387 A JP 3654387A JP H0547275 B2 JPH0547275 B2 JP H0547275B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- nozzle
- unit
- housing
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims description 25
- 238000005192 partition Methods 0.000 claims description 15
- 239000011247 coating layer Substances 0.000 claims description 6
- 238000000638 solvent extraction Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3654387A JPS63205172A (ja) | 1987-02-18 | 1987-02-18 | ポンプ付ノズル装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3654387A JPS63205172A (ja) | 1987-02-18 | 1987-02-18 | ポンプ付ノズル装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63205172A JPS63205172A (ja) | 1988-08-24 |
JPH0547275B2 true JPH0547275B2 (de) | 1993-07-16 |
Family
ID=12472685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3654387A Granted JPS63205172A (ja) | 1987-02-18 | 1987-02-18 | ポンプ付ノズル装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63205172A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004188416A (ja) * | 2002-12-06 | 2004-07-08 | Steag Microparts Gmbh | 液体を並行して配量するための装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01163573U (de) * | 1988-05-02 | 1989-11-15 | ||
FR2716729B1 (fr) * | 1994-02-25 | 1996-05-24 | Seva | Dispositif de dépose d'un matériau fluide, installation correspondante et procédé de mise en Óoeuvre du dispositif. |
JP5382309B2 (ja) * | 2008-12-17 | 2014-01-08 | トヨタ自動車株式会社 | 膜への層形成装置 |
-
1987
- 1987-02-18 JP JP3654387A patent/JPS63205172A/ja active Granted
Non-Patent Citations (1)
Title |
---|
PRODUCT INFORMATION METERING GEAR HEAD=1986 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004188416A (ja) * | 2002-12-06 | 2004-07-08 | Steag Microparts Gmbh | 液体を並行して配量するための装置 |
JP4566552B2 (ja) * | 2002-12-06 | 2010-10-20 | ボーリンガー インゲルハイム ミクロパルツ ゲーエムベーハー | 液体を並行して配量するための装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS63205172A (ja) | 1988-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |