JPH0547040B2 - - Google Patents

Info

Publication number
JPH0547040B2
JPH0547040B2 JP60146710A JP14671085A JPH0547040B2 JP H0547040 B2 JPH0547040 B2 JP H0547040B2 JP 60146710 A JP60146710 A JP 60146710A JP 14671085 A JP14671085 A JP 14671085A JP H0547040 B2 JPH0547040 B2 JP H0547040B2
Authority
JP
Japan
Prior art keywords
light
scanning direction
deflection means
sample
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60146710A
Other languages
English (en)
Japanese (ja)
Other versions
JPS628690A (ja
Inventor
Daikichi Awamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LASER TEC KK
Original Assignee
LASER TEC KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LASER TEC KK filed Critical LASER TEC KK
Priority to JP60146710A priority Critical patent/JPS628690A/ja
Priority to US06/777,342 priority patent/US4736110A/en
Priority to DE8585306813T priority patent/DE3586383T2/de
Priority to EP85306813A priority patent/EP0176358B1/en
Priority to KR1019850007160A priority patent/KR910000617B1/ko
Priority to CA000491791A priority patent/CA1266324A/en
Publication of JPS628690A publication Critical patent/JPS628690A/ja
Publication of JPH0547040B2 publication Critical patent/JPH0547040B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transforming Light Signals Into Electric Signals (AREA)
  • Color Television Image Signal Generators (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP60146710A 1984-09-28 1985-07-05 撮像装置 Granted JPS628690A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP60146710A JPS628690A (ja) 1985-07-05 1985-07-05 撮像装置
US06/777,342 US4736110A (en) 1984-09-28 1985-09-18 Image pick-up apparatus
DE8585306813T DE3586383T2 (de) 1984-09-28 1985-09-25 Bildaufnahmegeraet.
EP85306813A EP0176358B1 (en) 1984-09-28 1985-09-25 Image pick-up apparatus
KR1019850007160A KR910000617B1 (ko) 1984-09-28 1985-09-27 영상 픽업 장치
CA000491791A CA1266324A (en) 1984-09-28 1985-09-27 Image pick-up apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60146710A JPS628690A (ja) 1985-07-05 1985-07-05 撮像装置

Publications (2)

Publication Number Publication Date
JPS628690A JPS628690A (ja) 1987-01-16
JPH0547040B2 true JPH0547040B2 (en, 2012) 1993-07-15

Family

ID=15413788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60146710A Granted JPS628690A (ja) 1984-09-28 1985-07-05 撮像装置

Country Status (1)

Country Link
JP (1) JPS628690A (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2541236Y2 (ja) * 1993-05-25 1997-07-16 株式会社土井製作所 可撓管用接続装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108867A (ja) * 1981-12-23 1983-06-29 Sony Corp 画像変換装置
JPS6038987A (ja) * 1983-08-11 1985-02-28 Nec Corp 電荷転送撮像装置

Also Published As

Publication number Publication date
JPS628690A (ja) 1987-01-16

Similar Documents

Publication Publication Date Title
US4736110A (en) Image pick-up apparatus
US5260569A (en) Scanning microscope and scanning mechanism
JPS63217763A (ja) 光プリンタ
EP0040973B1 (en) An image reading out and recording apparatus
JP2002122553A (ja) 撮像装置及びフォトマスクの欠陥検査装置
JPS5829489B2 (ja) ヒカリソウサキノ ドウキコウサイシユホウホウ
US4642701A (en) Device of switching a scanning beam diameter
JPH0547039B2 (en, 2012)
JPS6180215A (ja) 走査型顕微鏡撮像装置
JPS62217218A (ja) 透過型顕微鏡撮像装置
JPH0547040B2 (en, 2012)
JPH0547038B2 (en, 2012)
JP2989330B2 (ja) 顕微鏡観察装置
JPS6218179A (ja) 撮像装置
JPS6210972A (ja) 撮像装置
JP2624481B2 (ja) 光誘起電流による半導体装置の検査装置
JPS62209510A (ja) 撮像装置
JPH0528940B2 (en, 2012)
JPH0367510B2 (en, 2012)
JPS61118710A (ja) 走査型顕微鏡撮像装置
JP2675863B2 (ja) 光ビーム走査装置
JPS61121022A (ja) 走査型顕微鏡撮像装置
JPS62237870A (ja) 撮像装置
JPS62218916A (ja) 透過型顕微鏡撮像装置
JP2758420B2 (ja) 反射型レーザ顕微鏡撮像装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees