JPH0546979B2 - - Google Patents

Info

Publication number
JPH0546979B2
JPH0546979B2 JP62315167A JP31516787A JPH0546979B2 JP H0546979 B2 JPH0546979 B2 JP H0546979B2 JP 62315167 A JP62315167 A JP 62315167A JP 31516787 A JP31516787 A JP 31516787A JP H0546979 B2 JPH0546979 B2 JP H0546979B2
Authority
JP
Japan
Prior art keywords
holder
sample
carrier
sample stage
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62315167A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01157540A (ja
Inventor
Shigeru Fukuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP62315167A priority Critical patent/JPH01157540A/ja
Publication of JPH01157540A publication Critical patent/JPH01157540A/ja
Publication of JPH0546979B2 publication Critical patent/JPH0546979B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP62315167A 1987-12-15 1987-12-15 ボンデイング装置における試料持ち上げ装置 Granted JPH01157540A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62315167A JPH01157540A (ja) 1987-12-15 1987-12-15 ボンデイング装置における試料持ち上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62315167A JPH01157540A (ja) 1987-12-15 1987-12-15 ボンデイング装置における試料持ち上げ装置

Publications (2)

Publication Number Publication Date
JPH01157540A JPH01157540A (ja) 1989-06-20
JPH0546979B2 true JPH0546979B2 (enExample) 1993-07-15

Family

ID=18062229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62315167A Granted JPH01157540A (ja) 1987-12-15 1987-12-15 ボンデイング装置における試料持ち上げ装置

Country Status (1)

Country Link
JP (1) JPH01157540A (enExample)

Also Published As

Publication number Publication date
JPH01157540A (ja) 1989-06-20

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