JPH0546203Y2 - - Google Patents
Info
- Publication number
- JPH0546203Y2 JPH0546203Y2 JP3414888U JP3414888U JPH0546203Y2 JP H0546203 Y2 JPH0546203 Y2 JP H0546203Y2 JP 3414888 U JP3414888 U JP 3414888U JP 3414888 U JP3414888 U JP 3414888U JP H0546203 Y2 JPH0546203 Y2 JP H0546203Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- leak
- wafer carrier
- target
- exhaust chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 51
- 238000005468 ion implantation Methods 0.000 description 15
- 238000003860 storage Methods 0.000 description 11
- 239000000428 dust Substances 0.000 description 9
- 238000011109 contamination Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009461 vacuum packaging Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414888U JPH0546203Y2 (enrdf_load_stackoverflow) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414888U JPH0546203Y2 (enrdf_load_stackoverflow) | 1988-03-14 | 1988-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01137060U JPH01137060U (enrdf_load_stackoverflow) | 1989-09-19 |
| JPH0546203Y2 true JPH0546203Y2 (enrdf_load_stackoverflow) | 1993-12-02 |
Family
ID=31260867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3414888U Expired - Lifetime JPH0546203Y2 (enrdf_load_stackoverflow) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546203Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-03-14 JP JP3414888U patent/JPH0546203Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01137060U (enrdf_load_stackoverflow) | 1989-09-19 |
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