JPH01137060U - - Google Patents

Info

Publication number
JPH01137060U
JPH01137060U JP3414888U JP3414888U JPH01137060U JP H01137060 U JPH01137060 U JP H01137060U JP 3414888 U JP3414888 U JP 3414888U JP 3414888 U JP3414888 U JP 3414888U JP H01137060 U JPH01137060 U JP H01137060U
Authority
JP
Japan
Prior art keywords
chamber
target
outside
vacuum chamber
preliminary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3414888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546203Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3414888U priority Critical patent/JPH0546203Y2/ja
Publication of JPH01137060U publication Critical patent/JPH01137060U/ja
Application granted granted Critical
Publication of JPH0546203Y2 publication Critical patent/JPH0546203Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP3414888U 1988-03-14 1988-03-14 Expired - Lifetime JPH0546203Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3414888U JPH0546203Y2 (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3414888U JPH0546203Y2 (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Publications (2)

Publication Number Publication Date
JPH01137060U true JPH01137060U (enrdf_load_stackoverflow) 1989-09-19
JPH0546203Y2 JPH0546203Y2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=31260867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3414888U Expired - Lifetime JPH0546203Y2 (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Country Status (1)

Country Link
JP (1) JPH0546203Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0546203Y2 (enrdf_load_stackoverflow) 1993-12-02

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