JPH0546120B2 - - Google Patents

Info

Publication number
JPH0546120B2
JPH0546120B2 JP8186367A JP8636781A JPH0546120B2 JP H0546120 B2 JPH0546120 B2 JP H0546120B2 JP 8186367 A JP8186367 A JP 8186367A JP 8636781 A JP8636781 A JP 8636781A JP H0546120 B2 JPH0546120 B2 JP H0546120B2
Authority
JP
Japan
Prior art keywords
magnetic field
deflection device
field deflection
linear accelerator
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8186367A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5725700A (en
Inventor
Beitsu Terensu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS5725700A publication Critical patent/JPS5725700A/ja
Publication of JPH0546120B2 publication Critical patent/JPH0546120B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
JP8636781A 1980-06-10 1981-06-06 Linear accelerator Granted JPS5725700A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8018987 1980-06-10

Publications (2)

Publication Number Publication Date
JPS5725700A JPS5725700A (en) 1982-02-10
JPH0546120B2 true JPH0546120B2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=10513943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8636781A Granted JPS5725700A (en) 1980-06-10 1981-06-06 Linear accelerator

Country Status (1)

Country Link
JP (1) JPS5725700A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851384B2 (ja) * 1976-04-13 1983-11-16 理化学研究所 荷電粒子ビ−ムの偏向方法
JPS6025977B2 (ja) * 1977-11-22 1985-06-21 株式会社東芝 放射線治療装置
US4191887A (en) * 1978-03-29 1980-03-04 Varian Associates, Inc. Magnetic beam deflection system free of chromatic and geometric aberrations of second order

Also Published As

Publication number Publication date
JPS5725700A (en) 1982-02-10

Similar Documents

Publication Publication Date Title
US3445650A (en) Double focussing mass spectrometer including a wedge-shaped magnetic sector field
JP3732533B2 (ja) 結像用の電子エネルギーフィルタ
EP0647960A1 (en) Energy filter with correction of a second-order chromatic aberration
JPH06101318B2 (ja) イオンマイクロビ−ム装置
US3541328A (en) Magnetic spectrograph having means for correcting for aberrations in two mutually perpendicular directions
KR102277431B1 (ko) 듀얼 빈 필터 모노크로메이터를 사용한 전자 빔 영상화
US6878937B1 (en) Prism array for electron beam inspection and defect review
EP0041753B1 (en) Deflection system for charged-particle beam
RU2740141C2 (ru) Система извлечения для вторичных заряженных частиц, предназначенная для применения в масс-спектрометре или другом устройстве для заряженных частиц
JPS5847823B2 (ja) スリツトソウサシキゾウヘンカンカン
TWI381413B (zh) 具有離子束/電荷粒子束的照射系統
US3379911A (en) Particle accelerator provided with an adjustable 270deg. non-dispersive magnetic charged-particle beam bender
JPS6333120B2 (enrdf_load_stackoverflow)
GB2079039A (en) A double focusing mass spectrometer
US6559445B2 (en) Electron energy filter with magnetic deflecting regions
JP3363718B2 (ja) オメガ型エネルギーフィルター
JPH0546120B2 (enrdf_load_stackoverflow)
US2824987A (en) Electron optical elements and systems equivalent to light optical prisms for charge carriers in discharge vessels
US3619686A (en) Color cathode-ray tube with in-line plural electron sources and central section of common grid protruding toward central source
US3243667A (en) Non dispersive magnetic deflection apparatus and method
JP3397347B2 (ja) オメガフィルタ
US3388359A (en) Particle beam focussing magnet with a septum wall
US2320582A (en) Cathode ray tube
US3213276A (en) Magnetic analyzing system for a mass spectrometer having bi-directional focusing
JP2007141488A (ja) 電子線装置及びパターン評価方法