JPH0545164B2 - - Google Patents

Info

Publication number
JPH0545164B2
JPH0545164B2 JP61042505A JP4250586A JPH0545164B2 JP H0545164 B2 JPH0545164 B2 JP H0545164B2 JP 61042505 A JP61042505 A JP 61042505A JP 4250586 A JP4250586 A JP 4250586A JP H0545164 B2 JPH0545164 B2 JP H0545164B2
Authority
JP
Japan
Prior art keywords
light
beam splitter
polarized light
lights
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61042505A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62200219A (ja
Inventor
Akira Ishizuka
Tetsuji Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP4250586A priority Critical patent/JPS62200219A/ja
Publication of JPS62200219A publication Critical patent/JPS62200219A/ja
Publication of JPH0545164B2 publication Critical patent/JPH0545164B2/ja
Granted legal-status Critical Current

Links

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  • Optical Transform (AREA)
JP4250586A 1986-02-27 1986-02-27 エンコ−ダ− Granted JPS62200219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4250586A JPS62200219A (ja) 1986-02-27 1986-02-27 エンコ−ダ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4250586A JPS62200219A (ja) 1986-02-27 1986-02-27 エンコ−ダ−

Publications (2)

Publication Number Publication Date
JPS62200219A JPS62200219A (ja) 1987-09-03
JPH0545164B2 true JPH0545164B2 (pm) 1993-07-08

Family

ID=12637921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4250586A Granted JPS62200219A (ja) 1986-02-27 1986-02-27 エンコ−ダ−

Country Status (1)

Country Link
JP (1) JPS62200219A (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100497A (en) * 1980-01-11 1981-08-12 Mitsumi Electric Co Ltd Ceramic circuit board
JPS57149912A (en) * 1981-03-13 1982-09-16 Nippon Telegr & Teleph Corp <Ntt> Optical position detector
FR2508664B1 (pm) * 1981-06-30 1985-07-19 Thomson Csf

Also Published As

Publication number Publication date
JPS62200219A (ja) 1987-09-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term