JPH0545102Y2 - - Google Patents
Info
- Publication number
- JPH0545102Y2 JPH0545102Y2 JP2351788U JP2351788U JPH0545102Y2 JP H0545102 Y2 JPH0545102 Y2 JP H0545102Y2 JP 2351788 U JP2351788 U JP 2351788U JP 2351788 U JP2351788 U JP 2351788U JP H0545102 Y2 JPH0545102 Y2 JP H0545102Y2
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- cooling medium
- cooling
- winding bobbin
- winding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004804 winding Methods 0.000 claims description 44
- 239000002826 coolant Substances 0.000 claims description 37
- 238000001816 cooling Methods 0.000 claims description 18
- 239000011347 resin Substances 0.000 claims description 12
- 229920005989 resin Polymers 0.000 claims description 12
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 229920001169 thermoplastic Polymers 0.000 claims 1
- 239000004416 thermosoftening plastic Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 230000020169 heat generation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Motor Or Generator Cooling System (AREA)
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2351788U JPH0545102Y2 (https=) | 1988-02-24 | 1988-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2351788U JPH0545102Y2 (https=) | 1988-02-24 | 1988-02-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01127379U JPH01127379U (https=) | 1989-08-31 |
| JPH0545102Y2 true JPH0545102Y2 (https=) | 1993-11-17 |
Family
ID=31242571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2351788U Expired - Lifetime JPH0545102Y2 (https=) | 1988-02-24 | 1988-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0545102Y2 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10127035A (ja) * | 1996-10-16 | 1998-05-15 | Canon Inc | リニアモータおよびこれを用いたステージ装置ならびに露光装置 |
| JP4623243B2 (ja) * | 1998-10-05 | 2011-02-02 | 株式会社ニコン | 電磁アクチュエータ及びステージ装置 |
| JP4092550B2 (ja) * | 2002-06-06 | 2008-05-28 | 株式会社安川電機 | 冷却機能付きボイスコイル形リニアモータ |
| EP2157480B1 (en) | 2003-04-09 | 2015-05-27 | Nikon Corporation | Exposure method and apparatus, and device manufacturing method |
| TWI360158B (en) | 2003-10-28 | 2012-03-11 | Nikon Corp | Projection exposure device,exposure method and dev |
| TWI385414B (zh) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
| KR100844759B1 (ko) * | 2003-12-09 | 2008-07-07 | 도시바 기카이 가부시키가이샤 | 코어리스 리니어 모터 |
| JP4721211B2 (ja) * | 2003-12-09 | 2011-07-13 | 東芝機械株式会社 | コアレス・リニアモータ |
| TWI609410B (zh) | 2004-02-06 | 2017-12-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
| WO2006038563A1 (ja) * | 2004-10-01 | 2006-04-13 | Nikon Corporation | リニアモータ、ステージ装置、及び露光装置 |
| KR20140140648A (ko) | 2005-05-12 | 2014-12-09 | 가부시키가이샤 니콘 | 투영 광학계, 노광 장치 및 노광 방법 |
| JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| JP2014042423A (ja) * | 2012-08-23 | 2014-03-06 | Sanyo Denki Co Ltd | リニアモータ |
-
1988
- 1988-02-24 JP JP2351788U patent/JPH0545102Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01127379U (https=) | 1989-08-31 |
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