JPH0544961B2 - - Google Patents

Info

Publication number
JPH0544961B2
JPH0544961B2 JP59152932A JP15293284A JPH0544961B2 JP H0544961 B2 JPH0544961 B2 JP H0544961B2 JP 59152932 A JP59152932 A JP 59152932A JP 15293284 A JP15293284 A JP 15293284A JP H0544961 B2 JPH0544961 B2 JP H0544961B2
Authority
JP
Japan
Prior art keywords
light
polarized light
dimensional
metal object
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59152932A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6131909A (ja
Inventor
Takanori Ninomya
Takashi Hiroi
Yasuo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15293284A priority Critical patent/JPS6131909A/ja
Publication of JPS6131909A publication Critical patent/JPS6131909A/ja
Publication of JPH0544961B2 publication Critical patent/JPH0544961B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP15293284A 1984-07-25 1984-07-25 金属物体の立体形状検出装置およびその方法 Granted JPS6131909A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15293284A JPS6131909A (ja) 1984-07-25 1984-07-25 金属物体の立体形状検出装置およびその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15293284A JPS6131909A (ja) 1984-07-25 1984-07-25 金属物体の立体形状検出装置およびその方法

Publications (2)

Publication Number Publication Date
JPS6131909A JPS6131909A (ja) 1986-02-14
JPH0544961B2 true JPH0544961B2 (OSRAM) 1993-07-07

Family

ID=15551289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15293284A Granted JPS6131909A (ja) 1984-07-25 1984-07-25 金属物体の立体形状検出装置およびその方法

Country Status (1)

Country Link
JP (1) JPS6131909A (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170746U (OSRAM) * 1987-01-14 1988-11-07
DE3806686A1 (de) * 1988-03-02 1989-09-14 Wegu Messtechnik Mehrkoordinatenmess- und -pruefeinrichtung
JPH0239449A (ja) * 1988-07-28 1990-02-08 Matsushita Electric Ind Co Ltd ワイヤボンディングの検査方法
JPH04105341A (ja) * 1990-08-24 1992-04-07 Hitachi Ltd 半導体装置のリード曲がり、浮き検出方法及び検出装置
JPH0563050A (ja) * 1991-08-29 1993-03-12 Adotetsuku Eng:Kk Ｉｃリードフレームの状態測定方法及び装置
JP3141470B2 (ja) * 1991-12-19 2001-03-05 株式会社日立製作所 ３次元形状検出方法および装置
JPH07103730A (ja) * 1993-09-30 1995-04-18 Sumitomo Metal Mining Co Ltd リードフレーム検査装置
JP5120625B2 (ja) * 2008-03-07 2013-01-16 アイシン精機株式会社 内面測定装置
JP6085795B2 (ja) * 2012-09-24 2017-03-01 シーシーエス株式会社 製品検査システム、製品検査方法及び製品検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854364B2 (ja) * 1975-07-10 1983-12-05 トウキヨウコウガクキカイ カブシキガイシヤ イソウコウゾウブツタイノカンサツホウホウ
JPS5467443A (en) * 1977-11-09 1979-05-30 Canon Inc Observer
JPS5754803A (en) * 1980-09-19 1982-04-01 Toshiba Corp Inspecting device for transparent pattern
JPS5929499A (ja) * 1982-08-12 1984-02-16 株式会社日立製作所 リ−ド先端位置検出方式

Also Published As

Publication number Publication date
JPS6131909A (ja) 1986-02-14

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