JPH0544826B2 - - Google Patents

Info

Publication number
JPH0544826B2
JPH0544826B2 JP60197414A JP19741485A JPH0544826B2 JP H0544826 B2 JPH0544826 B2 JP H0544826B2 JP 60197414 A JP60197414 A JP 60197414A JP 19741485 A JP19741485 A JP 19741485A JP H0544826 B2 JPH0544826 B2 JP H0544826B2
Authority
JP
Japan
Prior art keywords
electrode
vacuum chamber
electrodes
plasma cvd
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60197414A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257213A (ja
Inventor
Kazumi Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP19741485A priority Critical patent/JPS6257213A/ja
Publication of JPS6257213A publication Critical patent/JPS6257213A/ja
Publication of JPH0544826B2 publication Critical patent/JPH0544826B2/ja
Granted legal-status Critical Current

Links

JP19741485A 1985-09-06 1985-09-06 プラズマｃｖｄ装置 Granted JPS6257213A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19741485A JPS6257213A (ja) 1985-09-06 1985-09-06 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19741485A JPS6257213A (ja) 1985-09-06 1985-09-06 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6257213A JPS6257213A (ja) 1987-03-12
JPH0544826B2 true JPH0544826B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-07

Family

ID=16374116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19741485A Granted JPS6257213A (ja) 1985-09-06 1985-09-06 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6257213A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH107147A (ja) * 1996-06-19 1998-01-13 Unshiku Shin 炭酸飲料容器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0648834Y2 (ja) * 1989-02-17 1994-12-12 川崎製鉄株式会社 プラズマｃｖｄ装置
JP2948842B2 (ja) * 1989-11-24 1999-09-13 日本真空技術株式会社 インライン型ｃｖｄ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843508A (ja) * 1981-09-09 1983-03-14 Fuji Electric Corp Res & Dev Ltd 量産型成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH107147A (ja) * 1996-06-19 1998-01-13 Unshiku Shin 炭酸飲料容器

Also Published As

Publication number Publication date
JPS6257213A (ja) 1987-03-12

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Legal Events

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