JPH0544663Y2 - - Google Patents
Info
- Publication number
- JPH0544663Y2 JPH0544663Y2 JP4236191U JP4236191U JPH0544663Y2 JP H0544663 Y2 JPH0544663 Y2 JP H0544663Y2 JP 4236191 U JP4236191 U JP 4236191U JP 4236191 U JP4236191 U JP 4236191U JP H0544663 Y2 JPH0544663 Y2 JP H0544663Y2
- Authority
- JP
- Japan
- Prior art keywords
- room
- chamber
- air
- clean
- cleanliness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003749 cleanliness Effects 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4236191U JPH0544663Y2 (de) | 1991-03-07 | 1991-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4236191U JPH0544663Y2 (de) | 1991-03-07 | 1991-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0497235U JPH0497235U (de) | 1992-08-24 |
| JPH0544663Y2 true JPH0544663Y2 (de) | 1993-11-12 |
Family
ID=31777198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4236191U Expired - Lifetime JPH0544663Y2 (de) | 1991-03-07 | 1991-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544663Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19952852A1 (de) * | 1999-11-03 | 2001-05-10 | Bayer Ag | Hochreine Polymergranulate und Verfahren zu deren Herstellung |
-
1991
- 1991-03-07 JP JP4236191U patent/JPH0544663Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0497235U (de) | 1992-08-24 |
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