JPH0544043Y2 - - Google Patents
Info
- Publication number
- JPH0544043Y2 JPH0544043Y2 JP11283287U JP11283287U JPH0544043Y2 JP H0544043 Y2 JPH0544043 Y2 JP H0544043Y2 JP 11283287 U JP11283287 U JP 11283287U JP 11283287 U JP11283287 U JP 11283287U JP H0544043 Y2 JPH0544043 Y2 JP H0544043Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- polishing
- cooling plate
- dry
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 30
- 238000001816 cooling Methods 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 238000004458 analytical method Methods 0.000 description 6
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11283287U JPH0544043Y2 (enrdf_load_stackoverflow) | 1987-07-22 | 1987-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11283287U JPH0544043Y2 (enrdf_load_stackoverflow) | 1987-07-22 | 1987-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420252U JPS6420252U (enrdf_load_stackoverflow) | 1989-02-01 |
| JPH0544043Y2 true JPH0544043Y2 (enrdf_load_stackoverflow) | 1993-11-08 |
Family
ID=31352125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11283287U Expired - Lifetime JPH0544043Y2 (enrdf_load_stackoverflow) | 1987-07-22 | 1987-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544043Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-07-22 JP JP11283287U patent/JPH0544043Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6420252U (enrdf_load_stackoverflow) | 1989-02-01 |
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