JPH0542509B2 - - Google Patents
Info
- Publication number
- JPH0542509B2 JPH0542509B2 JP59007043A JP704384A JPH0542509B2 JP H0542509 B2 JPH0542509 B2 JP H0542509B2 JP 59007043 A JP59007043 A JP 59007043A JP 704384 A JP704384 A JP 704384A JP H0542509 B2 JPH0542509 B2 JP H0542509B2
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- coated
- cbn
- present
- hard substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052582 BN Inorganic materials 0.000 claims description 31
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- 238000005520 cutting process Methods 0.000 description 19
- 239000011247 coating layer Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 239000010410 layer Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- -1 iron group metals Chemical class 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/342—Boron nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP704384A JPS60152677A (ja) | 1984-01-20 | 1984-01-20 | 立方晶窒化硼素被覆硬質体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP704384A JPS60152677A (ja) | 1984-01-20 | 1984-01-20 | 立方晶窒化硼素被覆硬質体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60152677A JPS60152677A (ja) | 1985-08-10 |
| JPH0542509B2 true JPH0542509B2 (de) | 1993-06-28 |
Family
ID=11655019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP704384A Granted JPS60152677A (ja) | 1984-01-20 | 1984-01-20 | 立方晶窒化硼素被覆硬質体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60152677A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4971851A (en) * | 1984-02-13 | 1990-11-20 | Hewlett-Packard Company | Silicon carbide film for X-ray masks and vacuum windows |
| JPS6221778A (ja) * | 1985-07-17 | 1987-01-30 | 東芝タンガロイ株式会社 | 立方晶窒化ホウ素被覆体及びその製造方法 |
| JPS63239103A (ja) * | 1987-03-27 | 1988-10-05 | Ulvac Corp | 立方晶窒化硼素被覆体およびその製造法 |
| US5135801A (en) * | 1988-06-13 | 1992-08-04 | Sandvik Ab | Diffusion barrier coating material |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5775744A (en) * | 1980-10-31 | 1982-05-12 | Toshiba Tungaloy Co Ltd | Tool containing and coated with dispersed material |
| JPS6063372A (ja) * | 1983-09-19 | 1985-04-11 | Agency Of Ind Science & Technol | 高硬度窒化ホウ素薄膜の製造方法 |
-
1984
- 1984-01-20 JP JP704384A patent/JPS60152677A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5775744A (en) * | 1980-10-31 | 1982-05-12 | Toshiba Tungaloy Co Ltd | Tool containing and coated with dispersed material |
| JPS6063372A (ja) * | 1983-09-19 | 1985-04-11 | Agency Of Ind Science & Technol | 高硬度窒化ホウ素薄膜の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60152677A (ja) | 1985-08-10 |
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