JPH0542506B2 - - Google Patents

Info

Publication number
JPH0542506B2
JPH0542506B2 JP17374986A JP17374986A JPH0542506B2 JP H0542506 B2 JPH0542506 B2 JP H0542506B2 JP 17374986 A JP17374986 A JP 17374986A JP 17374986 A JP17374986 A JP 17374986A JP H0542506 B2 JPH0542506 B2 JP H0542506B2
Authority
JP
Japan
Prior art keywords
crucible
filament
clusters
support member
insulating support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17374986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6333560A (ja
Inventor
Takashi Tsukasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17374986A priority Critical patent/JPS6333560A/ja
Publication of JPS6333560A publication Critical patent/JPS6333560A/ja
Publication of JPH0542506B2 publication Critical patent/JPH0542506B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17374986A 1986-07-25 1986-07-25 薄膜蒸着装置 Granted JPS6333560A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17374986A JPS6333560A (ja) 1986-07-25 1986-07-25 薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17374986A JPS6333560A (ja) 1986-07-25 1986-07-25 薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS6333560A JPS6333560A (ja) 1988-02-13
JPH0542506B2 true JPH0542506B2 (cs) 1993-06-28

Family

ID=15966418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17374986A Granted JPS6333560A (ja) 1986-07-25 1986-07-25 薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS6333560A (cs)

Also Published As

Publication number Publication date
JPS6333560A (ja) 1988-02-13

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