JPH0541837Y2 - - Google Patents
Info
- Publication number
- JPH0541837Y2 JPH0541837Y2 JP13638887U JP13638887U JPH0541837Y2 JP H0541837 Y2 JPH0541837 Y2 JP H0541837Y2 JP 13638887 U JP13638887 U JP 13638887U JP 13638887 U JP13638887 U JP 13638887U JP H0541837 Y2 JPH0541837 Y2 JP H0541837Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- plate
- opening
- door
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001154 acute effect Effects 0.000 claims description 6
- 239000000428 dust Substances 0.000 description 16
- 239000000126 substance Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000037406 food intake Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003852 thin film production method Methods 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13638887U JPH0541837Y2 (enrdf_load_stackoverflow) | 1987-09-07 | 1987-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13638887U JPH0541837Y2 (enrdf_load_stackoverflow) | 1987-09-07 | 1987-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6439896U JPS6439896U (enrdf_load_stackoverflow) | 1989-03-09 |
| JPH0541837Y2 true JPH0541837Y2 (enrdf_load_stackoverflow) | 1993-10-21 |
Family
ID=31396849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13638887U Expired - Lifetime JPH0541837Y2 (enrdf_load_stackoverflow) | 1987-09-07 | 1987-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541837Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-09-07 JP JP13638887U patent/JPH0541837Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6439896U (enrdf_load_stackoverflow) | 1989-03-09 |
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