JPS6439896U - - Google Patents

Info

Publication number
JPS6439896U
JPS6439896U JP13638887U JP13638887U JPS6439896U JP S6439896 U JPS6439896 U JP S6439896U JP 13638887 U JP13638887 U JP 13638887U JP 13638887 U JP13638887 U JP 13638887U JP S6439896 U JPS6439896 U JP S6439896U
Authority
JP
Japan
Prior art keywords
sides
plate
door
chamber
chamber opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13638887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541837Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13638887U priority Critical patent/JPH0541837Y2/ja
Publication of JPS6439896U publication Critical patent/JPS6439896U/ja
Application granted granted Critical
Publication of JPH0541837Y2 publication Critical patent/JPH0541837Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP13638887U 1987-09-07 1987-09-07 Expired - Lifetime JPH0541837Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13638887U JPH0541837Y2 (enrdf_load_stackoverflow) 1987-09-07 1987-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13638887U JPH0541837Y2 (enrdf_load_stackoverflow) 1987-09-07 1987-09-07

Publications (2)

Publication Number Publication Date
JPS6439896U true JPS6439896U (enrdf_load_stackoverflow) 1989-03-09
JPH0541837Y2 JPH0541837Y2 (enrdf_load_stackoverflow) 1993-10-21

Family

ID=31396849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13638887U Expired - Lifetime JPH0541837Y2 (enrdf_load_stackoverflow) 1987-09-07 1987-09-07

Country Status (1)

Country Link
JP (1) JPH0541837Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0541837Y2 (enrdf_load_stackoverflow) 1993-10-21

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