JPH0541489Y2 - - Google Patents
Info
- Publication number
- JPH0541489Y2 JPH0541489Y2 JP13426489U JP13426489U JPH0541489Y2 JP H0541489 Y2 JPH0541489 Y2 JP H0541489Y2 JP 13426489 U JP13426489 U JP 13426489U JP 13426489 U JP13426489 U JP 13426489U JP H0541489 Y2 JPH0541489 Y2 JP H0541489Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- terminal
- insulating spacer
- attached
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13426489U JPH0541489Y2 (de) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13426489U JPH0541489Y2 (de) | 1989-11-17 | 1989-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0371542U JPH0371542U (de) | 1991-07-19 |
| JPH0541489Y2 true JPH0541489Y2 (de) | 1993-10-20 |
Family
ID=31681612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13426489U Expired - Lifetime JPH0541489Y2 (de) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541489Y2 (de) |
-
1989
- 1989-11-17 JP JP13426489U patent/JPH0541489Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0371542U (de) | 1991-07-19 |
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