JPH0541163U - Saturable core cooling device - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a compact, low-cost, saturable core cooling device that has a simple structure and does not require maintenance. [Structure] A heat exchanger 6 for cooling and liquefying a refrigerant vapor 8 inside a magnetic core container 1 containing a saturable inductance.
The magnetic core 2 is cooled by forming a refrigerant cycle of the refrigerant 5 having a low boiling point and a high insulating property.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a saturable magnetic core cooling device for a high repetition pulse power source, which is used in laser oscillators such as excimer lasers, carbon dioxide lasers, and fluorine lasers.

[0002]

[Prior Art]

 Fig. 5 shows the configuration of a saturable core cooler used in a conventional high repetition pulse power supply for large capacity laser discharge. In the figure, 31 is a primary refrigerant pump, 32 is a pipe, 33 is a valve for controlling the flow rate in the pipe 32, 34 is a magnetic core container provided in a pipe 32 circuit, 35 is a magnetic core in the magnetic core container 34, Reference numeral 36 is a heat exchanger, 37 is a primary refrigerant flowing in the pipe 32, and 38 is a secondary refrigerant such as cooling water for exchanging heat with the primary refrigerant 37 in the heat exchanger 36. A primary refrigerant 37 having a good insulating property such as insulating oil is filled in the magnetic core container 34 and the pipe 32, and is forcedly circulated by the primary refrigerant pump 31 to force the surface of the magnetic core 35 in the magnetic core 34. Cooling. The heated primary refrigerant 37 is cooled by exchanging heat with the secondary refrigerant 38 in the heat exchanger 36, cooled, and returned to the primary refrigerant pump 31.

[0003]

[Problems to be solved by the device]

 In the structure as shown in FIG. 5, when the magnetic core container 34 is considered as the center, the primary refrigerant pump 31, the pipe 32, the valve 33, the heat exchanger 36, etc. are all external facilities. Since the above-mentioned equipment and parts are required, there is a problem in that the installation location is required in addition to the magnetic core container 34 and the apparatus becomes large. In addition, the number of parts of the device is increased and maintenance is required, which may be a factor of increased cost and reduced reliability.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a saturable magnetic core of a high repetition pulse power supply used in a laser oscillator having a simple structure and a small size. To provide a cooling device.

[0005]

[Means and Actions for Solving the Problems]

 That is, according to the present invention, a refrigerant cycle is formed by a refrigerant having a low boiling point and a high insulating property, which includes a heat exchanger for liquefying the refrigerant vapor inside a magnetic core container that accommodates a saturable inductance to cool the magnetic core container. With such a structure, it is possible to provide a small-sized, low-cost saturable core cooling device which has a simple structure and requires no maintenance.

[0006]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the principle of its operation. Reference numeral 1 is a magnetic core container, and 2 is a magnetic core. A refrigerant passage 18 for the primary refrigerant 5 is formed inside the magnetic core container 1. In the refrigerant passage 18, when the temperature of the magnetic core surface rises due to heat generation of the magnetic core 2 and exceeds the boiling point temperature of the primary refrigerant 5. The primary refrigerant 5 around the surface of the magnetic core absorbs heat from the magnetic core 2 and rises as bubbles 7. When the bubbles 7 that have risen reach the liquid surface 4 of the primary refrigerant, they break up the foam to become refrigerant vapor 8 and reach the cooling fins of the heat exchanger 6.

The heat exchanger 6 circulates the secondary refrigerant 17 inside and exchanges heat with the refrigerant vapor 8 by applying the refrigerant vapor 8 to the cooling fins to absorb heat from the refrigerant vapor 8. . The refrigerant vapor 8 applied to the cooling fins of the heat exchanger 6 absorbs heat here and is cooled to a temperature below the boiling point to become a liquid, which is a refrigerant liquid below along the liquid path provided on the fin surface. A droplet 9 is dropped toward the surface. Then, the heat is again absorbed from the magnetic core 2 to become the refrigerant vapor 8, and the self-recirculation is continued in the same manner as above.

Hereinafter, a specific configuration in the magnetic core container 1 will be described with reference to FIGS. 2 to 4. FIG. 2 shows a first configuration example, and the same parts as those in FIG. 1 are designated by the same reference numerals. In the figure, below the liquid level 4 in the magnetic core container 1, all of the liquid including the magnetic core 2 is filled with a liquid primary refrigerant 5, and as the primary refrigerant 5, a fluorine-based inert liquid or pure water or the like is used. Use one with a low boiling point and high insulation.

The upper and lower surfaces of the magnetic core 2 in the primary refrigerant 5 serve as heat generating surfaces, and the heat generated by the magnetic core 2 evaporates the primary refrigerant 5 to a boiling point temperature or higher. The evaporated refrigerant is in the liquid primary refrigerant 5. To rise to bubbles 7 and break up at the liquid surface 4 of the primary refrigerant to become refrigerant vapor 8 which reaches the cooling surface of the heat exchanger 6, that is, the top plate of the magnetic core container 1. At this time, a bubble-decomposing porous plate 14 is installed at a position corresponding to the bubbles 7 on the primary refrigerant liquid level 4 to efficiently decompose the bubbles 7 into a refrigerant vapor 8 and the primary refrigerant liquid level 4 becomes the bubbles 7. It prevents it from being covered. Although not shown, the top plate of the magnetic core container 1 serves as a cooling fin of the heat exchanger 6, and the refrigerant vapor 8 is cooled to the boiling point temperature or lower by heat exchange with the secondary refrigerant 17 on the surface of the cooling fin. , Droplets 9 adhere to the fin surface. The droplet 9 attached to the fin surface is finally dropped toward the lower coolant surface 4 along the liquid path formed on the fin surface. Then, it is heated again by the magnetic core 2 in the primary refrigerant 5 to become the refrigerant vapor 8 and continues self-circulation.

In FIG. 2 above, the top plate of the magnetic core container 1 is used as the cooling surface of the heat exchanger 6, but in the second configuration example shown in FIG. 3, the surface in which the secondary refrigerant 17 flows in the space inside the magnetic core container 1. The case where the heat exchanger 6 having cooling fins is used is shown.

FIG. 4 shows a third configuration example in which the top plate of the magnetic core container 1 is used as the cooling surface of the heat exchanger 6 and the heat generating surface is changed to the side surface by changing the arrangement direction of the magnetic core 2. In this case, the porous plate 14 for bubble disintegration also functions as a guide plate for guiding the liquid droplets 9 dropped from the heat exchanger 6, and also has a role of controlling the circulation flow path of the primary refrigerant 5.

[0013]

[Effect of the device]

 As described above, according to the present invention, a refrigerant cycle is formed by a low boiling point and highly insulating cooling medium, which includes a heat exchanger for liquefying the vapor of the refrigerant inside the magnetic core container that accommodates the saturable inductance. Since the cooling is performed in this manner, it is possible to provide a saturable magnetic core cooling device of a high repetition pulse power source used for a small-sized, low-cost laser oscillator having a simple structure and requiring no maintenance.

[Brief description of drawings]

FIG. 1 is a diagram showing the operating principle of the present invention.

FIG. 2 is a diagram illustrating a first specific configuration according to an embodiment of the present invention.

FIG. 3 is a diagram illustrating a second specific configuration according to an embodiment of the present invention.

FIG. 4 is a diagram illustrating a third specific configuration according to an embodiment of the present invention.

FIG. 5 is a diagram showing a configuration of a conventional saturable core cooling device.

[Explanation of symbols]

1 ... Magnetic core container, 2 ... Magnetic core, 3 ... Magnetic core container lid, 4 ... Refrigerant liquid level, 5 ... Primary refrigerant (liquid), 6 ... Heat exchanger, 7 ... Bubbles, 8
... Refrigerant vapor, 9 ... Droplet, 10 ... Primary refrigerant flow, 11 ...
Magnetic core holder, 12 ... Spacer, 13 ... Degassing refrigerant sealed valve,
14 ... Perforated plate for air bubble decomposition, 15 ... Magnetic core winding, 16 ... Heat flow, 17 ... Secondary refrigerant (cooling water) ..., 18 ... Refrigerant passage.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical indication point 8934-4M H01S 3/097 Z (72) Creator Tetsuo Ichizaki 4-6 Kannon Shinmachi, Nishi-ku, Hiroshima-shi, Hiroshima No. 22 Inside Hiroshima Research Laboratory, Mitsubishi Heavy Industries, Ltd.

Claims (1)

[Scope of utility model registration request] 1. A saturable magnetic core cooling device for a high repetition pulse power source used in a laser oscillator, wherein a heat exchanger for liquefying a vapor of a refrigerant is included inside a magnetic core container that stores a saturable inductance. A saturable magnetic core cooling device characterized in that a cooling medium is formed by forming a cooling medium cycle having a cooling property.