JPH0196910A - Saturable inductor and manufacture thereof and pulse laser exciting power source device using saturable inductor - Google Patents

Abstract

PURPOSE:To improve magnetic characteristics and reduce the cost of a pulse laser exciting power source device, by heat-treating only an amorphous metal in a state the its metal is wound into the form of a coil and after that, by impregnating its metal with synthetic resin acting as an insulating material, thereby forming insulating layers into a spiral form at cavities that are still existent. CONSTITUTION:An amorphous metal 1 is wound into the form of a coil and after treating it with heat, cavities which are formed by winding the above amorphous metal are impregnated with synthetic resin. As the amorphous metal can be treated with heat as a single substance, its heating temperature and time required are set up optionally and the desired magnetic characteristics can be obtained. Moreover, since the belt-shaped amorphous metal 1 which is wound into the form of the coil is impregnated with an insulating material 2, its arrangement improve drastically the strength of saturable inductor. A pulse compression circuit permits a high electric potential conductor plate to be placed at a center and is interposed between two sheets of earth conductor plates 3a and 3b so as to realize stability and low inductance to high voltage. And a magnetic pulse compression device is composed by unifying electrostatic capacity of capacitors C2-C4 and by connecting a plurality of energy oscillation shifting circuits in series and further, by decreasing saturated inductance gradually, thereby using a, saturable inductor as an inductor in the circuit.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a saturable inductor, and particularly to one that is connected in series after a step-up transformer. The present invention also relates to a pulsed laser excitation power supply device using this saturable inductor.

[Conventional technology]

As shown in FIG. 7, the saturable inductor used in this type of pulsed laser excitation power supply device is constructed by winding an insulating material layer sandwiched between amorphous metals.

The purpose of using amorphous metal is to obtain excellent magnetic properties, but in order to obtain the desired magnetic properties, it is necessary to
Heat treatment is required at about 0°C to 500°C.

On the other hand, when amorphous metal is heated to the above-mentioned temperature, brittleness progresses and it becomes extremely brittle, so it is difficult to heat-treat it in advance and then wind it.

For this reason, in the past, it was necessary to manufacture the insulating material by overlapping and winding the untreated amorphous metal and then heat-treating it at the above-mentioned temperature.

For this reason, it is necessary to use an insulating material with excellent heat resistance, and conventionally, polyimide with high heat resistance (for example, DuPont Far East Nihonbunsha, trade name "Kapton") has been used to solve this problem. There is.

[Problem that the invention seeks to solve]

However, since polyimide is extremely expensive, there is a problem in that the cost of the saturable inductor increases.

The present invention has been made in view of the above-mentioned matters, and provides a saturable inductor that can be constructed using an inexpensive insulating material with low heat resistance and that can reduce costs, and a method for manufacturing the same. It is in.

In addition, it is a technical object of the present invention to provide a pulse laser excitation power supply device using this saturable inductor.

[Means for Solving the Problems] In order to solve the above technical problems, the present invention manufactured a saturable inductor by the following method.

That is, a band-shaped amorphous metal, which is a winding wire, is wound into a coil shape. After heat treatment, the gap formed by winding the amorphous metal is impregnated with synthetic resin. Examples of this impregnation step include drip immersion, dripping, coating, spraying, and vacuum impregnation.

Further, the amorphous metal 1 wound into a coil was heat-treated, and the gap formed by the winding of the amorphous metal was impregnated with a synthetic resin 2 to form a saturable inductor.

The composition of the amorphous metal is, for example, Pe, C.
o, B, Si-based, Fe, B, Si, C-based, Fe, B,
Si-based, Fe, B, St, Cr-based, Fe, Ni, M
o, B series, Co, Fe, Ni, Mo.

Examples include those based on B, Si, Go, Fe, Ni, B, and Si.

The pulse laser excitation power supply device includes a step-up transformer T
l, a pulse switch means SW for intermittently connecting a power source to the step-up transformer TI, and a plurality of pulse compression circuits connected in series to the output of the step-up transformer and each having a saturable inductor and an energy storage capacitor. The saturable inductor is constructed by heating a coiled amorphous metal l and impregnating the coiled amorphous metal with a synthetic resin 2.

[Effect]

The most important feature of the present invention is that only amorphous metal is wound into a coil and heat treated, then impregnated with synthetic resin as an insulating material, and an insulating layer is formed in the voids remaining in the spiral shape to form a saturable inductor. It consists in composing.

As a result, the impregnated synthetic resin is not required to have heat resistance. An inexpensive material such as polyester can be used.

Furthermore, since amorphous metal can be heated to any temperature, its magnetic properties can be maximized.

The synthetic resin to be impregnated is a thermoplastic resin, crystalline,
Low density polyethylene, high density polyethylene, polypropylene, poly 1-butene, poly 4-methyl-1-pentene or ethylene, propylene, 1-
Polyolefins such as random or block copolymers of α-olefins such as butene and 4-methyl-1-pentene, ethylene and acrylic acid copolymers, ethylene and vinyl acetate copolymers, ethylene and vinyl alcohol copolymers, Ethylene, vinyl compound copolymers such as ethylene and vinyl chloride copolymers, polystyrene, acrylonitrile,
Styrene copolymer, ABS, methyl methacrylate, styrene copolymer, α-methylstyrene, styrene resin such as styrene copolymer, polyvinyl chloride, polyvinylidene chloride, vinyl chloride, vinylidene chloride copolymer, acrylic acid Examples of esters include polyvinyl compounds such as polymethyl acrylate and polymethyl methacrylate, polyamides such as nylon 6, nylon 6-6, nylon 6-10, nylon 11, and nylon 12, polyethylene terephthalate,
Any resin such as thermoplastic polyester such as polybutylene terephthalate, polycarbonate, polyphenylene oxide, a mixture thereof, silicone type, urethane type, etc. may be used.

Furthermore, epoxy or urea-based thermosetting resins can also be used.

As described above, various resins can be used, but they should be selected depending on the performance required of the saturable inductor, taking into account dielectric constant, insulation resistance, weather resistance, etc.

〔Example〕

Embodiments of the present invention will be described based on FIGS. 1 to 4.

A band-shaped amorphous metal 1 serving as a winding wire is wound into a spiral coil shape. Then, it was heat-treated at 400° C. for 2 hours in a 10 Oe magnetic field and N atmosphere to obtain the desired magnetic properties. The magnetic properties here are saturation magnetic flux density ΔB and B
- Shows squareness etc. in H characteristics.

This coiled amorphous metal 1 is immersed in molten polyester to impregnate the spiral gap 1a with polyester.

At this time, it is necessary to impregnate the coil evenly so that the windings of the coil are completely insulated.

The insulating material 2 is not required to have heat resistance unlike conventional ones, so any synthetic resin material can be used in addition to the polyester resin used in the example if the electrical properties and weather resistance meet the conditions. can be used. It goes without saying that the heating temperature, heating time, and annealing time of the amorphous metal can be arbitrarily set depending on the type of amorphous metal so as to obtain the necessary magnetic properties.

As mentioned above, since a single amorphous metal can be heat-treated, the heating temperature and heating time can be set as desired.
- Desired magnetic properties can be obtained.

Further, since the strip-shaped amorphous metal l is wound into a spiral coil shape and is impregnated with the insulating material 2, the strength of the saturable inductor can be greatly improved. Therefore, improvement in transient characteristics can be expected.

Furthermore, since thermal coupling between the windings can be achieved, heat dissipation characteristics can also be improved.

FIG. 3 shows the electrical configuration of a high-speed repetitive pulse laser excitation power supply device using the saturable inductor having the above configuration. The device in the figure is a charging power supply PS.

A semiconductor switching element SW1 such as an SCR connected to a charging power source PS1, an energy storage capacitor C1, a step-up transformer TI having a primary coil connected to both ends of the semiconductor switch element SW via a capacitor CI, and this step-up transformer T
A saturable inductor SL cascaded to the secondary coil of I
I, SL2. It consists of SL3 and capacitors CI, C2, and C3, and a laser load LD such as a maximer laser is connected to it. FIG. 4 shows a specific configuration of the pulse compression circuit used in the device shown in FIG.

As shown in Fig. 4, the pulse compression circuit places a high potential conductor plate in the center and connects it to two ground conductor plates 3a in order to achieve stability against high voltage and low inductance.
, 3b. Each of the capacitors CI, C2, and C3 is constructed by connecting a plurality of ceramic capacitors each having a small residual inductance in parallel, for example.

Note that, for example, an oil capacitor or the like can be used as the energy storage capacitor Ct connected to the primary coil side of the step-up transformer TI. Each saturable inductor SLI, SL
2. Cooling fans 5a, 5b, and 5c are provided near the SL3, but liquid cooling may be used as the cooling means. Moreover, each saturable inductor SLI, SL2 . SL3 was manufactured by the method described above.

Each of the saturable inductors SLI, SL2 . The SL3 is constructed so that the inductance 5Lsat at saturation is, for example, gradually reduced by using a desired number of each of these magnetic cores and by appropriately selecting the number of windings of the coil.

The operation of the high-speed repetitive pulse laser excitation power supply device configured as described above will be explained. First, use the high-voltage charging power supply PS to store the energy storage capacitor C! is charged to VCI (voltage), and the semiconductor switch SW is made conductive by externally triggering the gate of the semiconductor switch SW. As a result, the charge of capacitor C1 is transferred to capacitor C2 via step-up transformer TI, and capacitor C
2 reaches V C2ff1ax.

Here, the saturable inductor SLI is in an unsaturated state during this time and has a high inductance. Almost no charge on the capacitor C2 is transferred to the capacitor C3. On the other hand, when the voltage of the capacitor C2 reaches V C2max, the saturable inductor SLI enters a saturated state and is designed to rapidly reduce its self-inductance. As a result, the charge accumulated in the capacitor C2 does not return to the capacitor CI, and the charge accumulated in the capacitor C2 and the saturable inductor SL
1 and the capacitor C3, and the voltage of the capacitor C3 reaches the maximum voltage V C3a+ax after the lapse of time τ1. At this time, the time constant τ! is expressed by the following formula.

r l -rr rsLlsatX (C1x C2
)/(C1+C2) where S L 1sat is the saturation inductance of the saturable inductor SLI. During the time constant τl expressed by the above equation, the saturable inductor S
L2 is in an unsaturated state, and the charge accumulated in capacitor C2 does not flow into capacitor C4, but is mostly transferred to capacitor C3. Then, the voltage of capacitor C3 is V
When C3max is reached, the saturable inductor SL2 suddenly becomes saturated, but by making the saturable inductance of the saturable inductor SL2 smaller than that of the saturable inductor SLI, the capacitor C3, the saturable inductor SL2, and the capacitor It becomes possible to effectively transfer the energy stored in the capacitor C3 to the capacitor C4 according to the time constant τ2 of the circuit constituted by C4, and to compress the current pulse width.

In this case, the time constant τ2 is expressed by the following equation.

t2 = π-r [5L2satX C3x C4
)/(C3+C4 where S L 2set is the saturation inductance of the saturable inductor SL2.

Similarly, the charge on capacitor C3 is completely reduced to capacitor C4.
The saturable inductor SL3 remains unsaturated until the energy is transferred to the capacitor C4, and the saturable inductor SL3 becomes saturated when the energy transfer occurs and the voltage of the capacitor C4 reaches the maximum, and the energy stored in the capacitor C4 is transferred to the load LD. flows into.

Note that the output impedance Z out of the power supply device is Z
out = 2-r (S, L3sat/C4), and by considering the shape of the saturable inductor SL3, its saturation inductance 5L3sat can be expressed as
Since the output impedance Z out can be made as small as nH, it is possible to make the output impedance Z out 1Ω or less.

In this way, capacitors C2, C3, and C4 have the same capacitance, multiple energy resonance transfer circuits are connected in series, a saturable inductor is used as the inductor in the circuit, and the saturable inductance of the saturable inductor is By gradually decreasing the number of pulses, it is possible to construct a magnetic pulse compression device, which allows efficient transmission of energy and energy, gradually reduces impedance, and compresses the pulse width. Furthermore, the output impedance of the pulsed power source can be matched to the low discharge impedance of the excimer laser.

FIGS. 5 and 6 show other configuration examples of the high-speed repetitive pulse laser excitation power supply device. What is shown in FIG. 5 is a magnetic assist circuit. Thyratron S as a pulse switch
It uses W, and uses a saturable inductor SL as a protection circuit to improve the life of the thyratron SW.

The circuit shown in FIG. 6 uses a saturable inductor SL as a magnetic output switch.

As this impedance circuit Z, a capacitor or a pulse shaping circuit (pulse shaping line) can be used.

〔Effect of the invention〕

According to the present invention, only amorphous metal is heated in a coiled state, and then impregnated with a synthetic resin serving as an insulating material, and an insulating layer is formed in the spirally remaining voids. The resin is not required to have heat resistance, and inexpensive resins such as polyester can be used.

Furthermore, since amorphous metal can be heated to any temperature, its magnetic properties can be maximized.

Therefore, a pulse laser excitation power supply device using this saturable inductor can also be manufactured at low cost.

[Brief explanation of the drawing]

1 to 6 show examples of the present invention, FIG. 1 is a perspective view of heat-treated amorphous metal, FIG. 2 is a perspective view of amorphous metal impregnated with synthetic resin,
Figure 3 is a circuit diagram of a pulsed laser excitation power supply using a saturable inductor, Figure 4 is a side view showing the internal structure of a pulse compression circuit used in the pulsed laser excitation power supply, and Figures 5 and 6 are FIG. 7 is a circuit diagram showing another configuration example of the pulsed laser excitation power supply device, and is a partially cutaway perspective view showing the internal structure of a standard saturable inductor. 1... Amorphous metal, 2... Insulating material, Tl... Step-up transformer, PS... Charging power supply, SLI, SL2. SL3...Saturable inductor, C
I, C2, C3, C4...Capacitor, LL...Bypass inductor, LD...Laser load. Patent applicant Mitsui Petrochemical Industries, Ltd. Figure 1 Figure 2 Figure 5 PS Figure 6 L S Figure 7 Procedural amendment (voluntary) December 25, 1988

Claims (3)

[Claims] (1) A saturable inductor characterized by impregnating a heat-treated amorphous metal coil with synthetic resin. (2) A method for producing a saturable inductor, which comprises winding an amorphous metal into a coil, heat-treating it, and then impregnating a synthetic resin into the gap formed by the winding of the amorphous metal. (3) a step-up transformer; a pulse switch means for intermittently connecting a power source to the step-up transformer; and a saturable inductor connected in series to the output of the step-up transformer; The saturable inductor includes a plurality of pulse compression circuits having a storage capacitor, and the saturable inductor is formed by heat-treating amorphous metal wound into a coil, and impregnating the heat-treated amorphous metal coil with a synthetic resin. A pulsed laser excitation power supply device featuring: