JP2545098B2 - Method for manufacturing saturable inductor - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a saturable inductor, and more particularly, to a saturable inductor that is cascadedly connected to a subsequent stage of a step-up transformer.

[Conventional technology]

As a saturable inductor used for a pulsed laser excitation power supply device or the like, a band-shaped amorphous metal in which an insulating material is superposed and wound is known. The reason for using the amorphous metal is that the amorphous metal has the characteristics of low iron loss, high saturation magnetic flux density, and high squareness (high magnetic permeability), and it is possible to achieve miniaturization and high performance of the inductor. .

However, in general, the magnetic characteristics of an amorphous magnetic material are significantly deteriorated due to strain generated during quenching for manufacturing or during processing. Therefore, in order to improve the magnetic characteristics, the temperature is lower than the crystallization temperature and the Curie It is necessary to perform heat treatment for strain relief near the temperature.

For this reason, conventionally, as shown in FIG. 8, an insulating film 21 is superposed on a band-shaped amorphous metal 20 and wound to form a coil, and then the whole is heat-treated to remove strain.

[Problems to be solved by the invention]

However, in the above-described manufacturing method, the step of winding the amorphous metal on the insulating material is indispensable, so that the manufacturing apparatus becomes complicated and the cost of the saturable inductor increases.

The present invention has been made in view of such problems,
It is a technical object to provide a method of manufacturing a saturable inductor which is easy to manufacture and can reduce the cost.

[Means for solving problems]

In order to solve the above technical problem, the present invention manufactured a saturable inductor by the following method.

That is, the band-shaped amorphous metal 1 is coated with the insulating agent 2 and then wound into a coil.

If necessary, the coiled material is heat-treated at a temperature equal to or lower than the melting point of the insulating agent 2.

The coating process can be exemplified by coating or spraying, or vacuum deposition, and its thickness is, for example, 0.
1 μm to 10 μm is suitable.

The composition of the amorphous metal is Fe, Co, B, Si.
System, Fe, B, Si, C system, Fe, B, Si system, Fe, B, Si, Cr system, Fe, Ni, M
Examples include o, B type, Co, Fe, Ni, Mo, B, Si type, Co, Fe, Ni, B, Si type and the like.

[Action]

The greatest feature of the present invention is that a band-shaped amorphous metal is coated with an insulating agent and then the amorphous metal is wound into a coil to manufacture a saturable inductor. Therefore, at the time of manufacturing, the insulating agent can be continuously formed on the band-shaped amorphous metal, and the productivity is greatly improved. The coating may be applied to one side or both sides of the amorphous metal.

Further, the amorphous metal may be coated in an unripened state, or may be heat-treated before coating to improve the magnetic properties, if necessary, before coating.

Further, the magnetic characteristics can be improved by heating the amorphous metal after winding, if necessary.

As the insulating agent to be coated, synthetic resin, magnesium oxide, silicon dioxide, or ceramic can be used.

Synthetic resins include low density polyethylene, high density polyethylene, regardless of whether they are crystalline or amorphous, as thermoplastic resins.
Polypropylene, poly 1-butene, poly 4-methyl-1
-Pentene or polyolefin such as ethylene or propylene, 1-butene, 4-methyl-1-pentene or other α-olefin random or block copolymer, ethylene, acrylic acid copolymer, ethylene, vinyl acetate copolymer , Ethylene, vinyl alcohol copolymer,
Ethylene, vinyl compound copolymer such as ethylene, vinyl chloride copolymer, polystyrene, acrylonitrile, styrene copolymer, ABS, methyl methacrylate, styrene copolymer, styrene-based such as α-methylstyrene, styrene copolymer Resin, polyvinyl chloride, polyvinylidene chloride,
Polyvinyl compound such as vinyl chloride, vinylidene chloride copolymer, polymethyl acrylate, polymethyl methacrylate, nylon 6, polyamide such as nylon 6, nylon 6-6, nylon 6-10, nylon 11 and nylon 12, polyethylene terephthalate, polybutylene Thermoplastic polyester such as terephthalate, polycarbonate, polyphenylene oxide, other, polyparaxylylene-based, polymonochloroparaxylylene-based, polydichloroparaxylylene-based, polyurethane-based, silicone-based, or a mixture thereof may be used. .

As described above, various resins can be used, but it is preferable to select them in consideration of the dielectric constant, insulation resistance, weather resistance, etc., according to the performance required for the saturable inductor.

〔Example〕

An embodiment of the present invention will be described with reference to FIGS. 1 to 7.

<First Example> While a belt-shaped amorphous metal 1 is being pushed out by a roller 3, a synthetic resin (2) is sprayed onto one surface of the amorphous metal 1 by a synthetic resin jet nozzle 4. As a result, a coating layer having a thickness of 0.2 μm is formed. Let it dry,
After that, the amorphous metal 1 is wound into a coil as shown in FIG.

The coating process requires uniform coating so as to completely insulate the windings of the coil.

As described above, the characteristic as the saturable inductor is obtained in a state where the amorphous metal 1 is wound, and the magnetic characteristic can be improved by heating the saturable inductor configured as above. Here, the magnetic characteristics are B
The squareness and the saturation magnetic flux density ΔB in the −H characteristic are shown.

The heating temperature, heating time, and annealing time of the amorphous metal can be arbitrarily set according to the type of the amorphous metal so that the required magnetic properties can be obtained. In that case, at a temperature below the melting point of the synthetic resin (2). It is necessary to heat-treat.

The coating may be performed before the heat treatment of the amorphous metal or after the heat treatment of the amorphous metal to improve the magnetic characteristics.

<Second Embodiment> In the above-mentioned embodiment, the synthetic resin (2) is sprayed on one surface of the amorphous metal 1 to form the insulating layer. However, as shown in FIG. The insulating layer may be formed by spraying the resin (2), and in this case, the insulating property can be made more reliable.

Third Embodiment A ceramic-based insulating agent 2 is formed on the surface of an amorphous metal 1 by vacuum vapor deposition. Insulating agent 2 is magnesium oxide, silicon dioxide (silica)
Can be used. Further, silicon dioxide can be formed and fixed on the surface of the amorphous metal 1 while being dispersed and contained in a volatile solvent.

The method for manufacturing the saturable inductor has been described above. A high-speed repetitive pulse laser excitation power supply device using the saturable inductor manufactured by the manufacturing method will be described below with reference to FIG.

The device in the figure is a charging power supply PS, and an SC connected to the charging power supply PS.
A semiconductor switch element SW such as R, an energy storage capacitor C1, a step-up transformer T1 in which a primary coil is connected to both ends of the semiconductor switch element SW via a capacitor C1, and a secondary coil of this step-up transformer T1 is cascade-connected. It is composed of saturable inductors SL1, SL2, SL3 and capacitors C1, C2, C3, to which a laser load LD such as an excimer laser is connected. FIG. 5 shows a specific configuration of a pulse compression circuit used in the apparatus shown in FIG. As shown in FIG. 5, the pulse compression circuit places a high-potential conductor plate at the center and sandwiches it between two ground conductor plates 3a and 3b in order to realize stability against high voltage and low inductance. It has a structure. Each of the capacitors C1, C2, and C3 is configured by, for example, connecting a plurality of ceramic capacitors each having a small residual inductance in parallel.

Note that, for example, an oil capacitor or the like can be used as the energy storage capacitor C1 connected to the primary coil side of the step-up transformer T1. In addition, each saturable inductor SL1SL2, S
L3 is produced by the method described above.

Each of the saturable inductors SL1, SL2, SL3 uses a desired number of such magnetic cores, and the inductance SL when saturated is determined by appropriately selecting the number of coil windings.
For example, sat is configured to be gradually reduced.

The operation of the high-speed repetitive pulsed laser excitation power supply device configured as described above will be described. First, the energy storage capacitor C1 is charged to Vc1 (voltage) by the high-voltage charging power source PS, and the gate of the semiconductor switch SW is triggered from the outside to make the semiconductor switch SW conductive. As a result, the charge of the capacitor C1 is transferred to the capacitor C2 via the step-up transformer T1, and the voltage of the capacitor C2 is VC2max.
Reach

Here, the saturable inductor SL1 is in an unsaturated state during this period and has a high inductance, so that almost no charge of the capacitor C2 flows out to the capacitor C3. On the other hand, the saturable inductor SL1 is designed to be saturated when the voltage of the capacitor C2 reaches VC2max, and the inductance is rapidly reduced. As a result, the electric charge accumulated in the capacitor C2 does not return to the capacitor C1 but the capacitor C3 follows the time constant τ1 of the circuit composed of the capacitor C2, the saturable inductor SL1 and the capacitor C3.
The voltage of the capacitor C3 after τ1 time reaches the maximum voltage VC3max. At this time, the time constant τ1 is expressed by the following equation.

Here, SL1sat is the saturation inductance of the saturable inductor SL1. During the time of the time constant τ1 represented by the above equation, the saturable inductor SL2 is in an unsaturated state, and the electric charge accumulated in the capacitor C2 does not flow into the capacitor C4,
Almost transferred to the capacitor C3. And the capacitor
When the voltage of C3 reaches VC3max, the saturable inductor SL2 saturates rapidly.However, by keeping the saturation inductance of the saturable inductor SL2 smaller than that of the saturable inductor SL1, the capacitor C3, saturable inductor According to the time constant τ2 of the circuit formed by SL2 and the capacitor C4, the energy stored in the capacitor C3 can be effectively transferred to the capacitor C4 and the pulse width can be compressed. In this case, the time constant τ2 is expressed by the following equation.

Here, SL2sat is the saturation inductance of the saturable inductor SL2.

Similarly, the saturable inductor SL3 remains in an unsaturated state until the electric charge of the capacitor C3 is completely transferred to the capacitor C4, and the saturable inductor SL3 is saturated when the energy transfer is performed and the voltage of the capacitor C4 becomes maximum. Then, the energy stored in the capacitor C4 flows into the load LD.

The output impedance Zout of the power supply is The saturation inductance SL3sat can be reduced to several tens of nH by considering the shape of the saturable inductor SL3, so the output impedance Zout is 1Ω.
It can be:

In this way, multiple energy resonance transfer circuits are connected in series, a saturable inductor is used as the inductor in the circuit, the capacitors C2, C3, and C4 have the same capacitance, and the saturation inductance of the saturable inductor is By gradually reducing it, it becomes possible to construct a magnetic pulse compression device, and energy is efficiently transmitted, and
It is possible to sequentially reduce the impedance and compress the pulse width. Furthermore, the output impedance of the pulse power source and the discharge impedance of the excimer laser can be matched.

6 and 7 show another configuration example of the high-speed repetition pulse laser excitation power supply device. What is shown in FIG. 6 is a magnetic assist circuit. Thyratron as a pulse switch
SW is used, and a saturable inductor is used as a protection circuit for the life of the thyratron SW.

The circuit shown in FIG. 7 is a circuit using a saturable inductor as a magnetic output switch (pulse sharpening switch). As the impedance circuit Z, a capacitor or a pulse shaping circuit (pulse shaping line) can be used.

EFFECTS OF THE INVENTION According to the present invention, a band-shaped amorphous metal is coated with a synthetic resin as an insulating material, silicon dioxide, magnesium oxide, or ceramics, and then the amorphous metal is wound into a coil to manufacture a saturable inductor. By doing so, the insulator can be continuously formed on the band-shaped amorphous metal, and the productivity is greatly improved.

Further, the magnetic characteristics can be improved by heating the amorphous metal after winding, if necessary.

[Brief description of drawings]

1 to 4 show an embodiment of the present invention, FIG. 1 is a sectional view showing a manufacturing process, FIG. 2 is a sectional view of a saturable inductor, and FIG. 3 is a manufacturing process of another embodiment. FIG. 4 is a cross-sectional view, FIG. 4 is a circuit diagram of a pulse laser excitation power supply device using a saturable inductor, FIG. 5 is a cross-sectional view of a pulse compression circuit used in the device of FIG. 4, FIG. 6 and FIG. FIG. 8 is a circuit diagram showing another configuration example of the pulsed laser excitation power supply device, and FIG. 8 is a partially exploded perspective view of a conventional saturable inductor. 1 ... Amorphous metal, 2 ... Insulating agent, T1 ... Step-up transformer, PS ... Charging power source, SL1, SL2, SL3 ... Saturable inductor, C1, C2, C3, C4 ... Capacitor. LL: Bypass inductor, LD: Laser load.

Claims (6)

(57) [Claims] 1. A method of manufacturing a saturable inductor, characterized in that a strip-shaped amorphous metal 1 is coated with an insulating agent 2 and then wound in a coil shape. 2. A strip-shaped amorphous metal 1 is coated with an insulating agent 2 and then wound in a coil shape and heat-treated at a temperature below the melting point of the insulating agent 2. A method for manufacturing the saturable inductor described. 3. The saturable inductor manufacturing method according to claim 1, wherein the insulating agent 2 is a synthetic resin. 4. The method of manufacturing a saturable inductor according to claim 1, wherein the insulating agent 2 is magnesium oxide. 5. The method of manufacturing a saturable inductor according to claim 1, wherein the insulating agent 2 is silicon dioxide. 6. The method of manufacturing a saturable inductor according to claim 1, wherein the insulating agent 2 is ceramic.