JPH0539629Y2 - - Google Patents

Info

Publication number
JPH0539629Y2
JPH0539629Y2 JP1987084971U JP8497187U JPH0539629Y2 JP H0539629 Y2 JPH0539629 Y2 JP H0539629Y2 JP 1987084971 U JP1987084971 U JP 1987084971U JP 8497187 U JP8497187 U JP 8497187U JP H0539629 Y2 JPH0539629 Y2 JP H0539629Y2
Authority
JP
Japan
Prior art keywords
reaction chamber
wafer
epitaxial growth
atmosphere
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987084971U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63193831U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987084971U priority Critical patent/JPH0539629Y2/ja
Publication of JPS63193831U publication Critical patent/JPS63193831U/ja
Application granted granted Critical
Publication of JPH0539629Y2 publication Critical patent/JPH0539629Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987084971U 1987-05-29 1987-05-29 Expired - Lifetime JPH0539629Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987084971U JPH0539629Y2 (cg-RX-API-DMAC7.html) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987084971U JPH0539629Y2 (cg-RX-API-DMAC7.html) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193831U JPS63193831U (cg-RX-API-DMAC7.html) 1988-12-14
JPH0539629Y2 true JPH0539629Y2 (cg-RX-API-DMAC7.html) 1993-10-07

Family

ID=30939948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987084971U Expired - Lifetime JPH0539629Y2 (cg-RX-API-DMAC7.html) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0539629Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102844178B (zh) 2010-02-15 2015-09-16 多产研究有限责任公司 可成型的轻质复合材料体系及方法

Also Published As

Publication number Publication date
JPS63193831U (cg-RX-API-DMAC7.html) 1988-12-14

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