JPH0538059Y2 - - Google Patents

Info

Publication number
JPH0538059Y2
JPH0538059Y2 JP1987148111U JP14811187U JPH0538059Y2 JP H0538059 Y2 JPH0538059 Y2 JP H0538059Y2 JP 1987148111 U JP1987148111 U JP 1987148111U JP 14811187 U JP14811187 U JP 14811187U JP H0538059 Y2 JPH0538059 Y2 JP H0538059Y2
Authority
JP
Japan
Prior art keywords
crucible
divided
graphite
pedestal
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987148111U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6454330U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987148111U priority Critical patent/JPH0538059Y2/ja
Publication of JPS6454330U publication Critical patent/JPS6454330U/ja
Application granted granted Critical
Publication of JPH0538059Y2 publication Critical patent/JPH0538059Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1987148111U 1987-09-30 1987-09-30 Expired - Lifetime JPH0538059Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987148111U JPH0538059Y2 (enExample) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987148111U JPH0538059Y2 (enExample) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6454330U JPS6454330U (enExample) 1989-04-04
JPH0538059Y2 true JPH0538059Y2 (enExample) 1993-09-27

Family

ID=31419130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987148111U Expired - Lifetime JPH0538059Y2 (enExample) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0538059Y2 (enExample)

Also Published As

Publication number Publication date
JPS6454330U (enExample) 1989-04-04

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