JPS6236279Y2 - - Google Patents

Info

Publication number
JPS6236279Y2
JPS6236279Y2 JP1982169157U JP16915782U JPS6236279Y2 JP S6236279 Y2 JPS6236279 Y2 JP S6236279Y2 JP 1982169157 U JP1982169157 U JP 1982169157U JP 16915782 U JP16915782 U JP 16915782U JP S6236279 Y2 JPS6236279 Y2 JP S6236279Y2
Authority
JP
Japan
Prior art keywords
frame side
bodies
rear frame
motherboard
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982169157U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5972726U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982169157U priority Critical patent/JPS5972726U/ja
Priority to EP83107498A priority patent/EP0100539A3/en
Priority to KR1019830003575A priority patent/KR920001025B1/ko
Publication of JPS5972726U publication Critical patent/JPS5972726U/ja
Application granted granted Critical
Publication of JPS6236279Y2 publication Critical patent/JPS6236279Y2/ja
Granted legal-status Critical Current

Links

JP1982169157U 1982-07-30 1982-11-08 拡散治具のマザ−ボ−ト Granted JPS5972726U (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1982169157U JPS5972726U (ja) 1982-11-08 1982-11-08 拡散治具のマザ−ボ−ト
EP83107498A EP0100539A3 (en) 1982-07-30 1983-07-29 Assembled device for supporting semiconductor wafers or the like
KR1019830003575A KR920001025B1 (ko) 1982-07-30 1983-07-30 반도체 웨이퍼 지지용 조립장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982169157U JPS5972726U (ja) 1982-11-08 1982-11-08 拡散治具のマザ−ボ−ト

Publications (2)

Publication Number Publication Date
JPS5972726U JPS5972726U (ja) 1984-05-17
JPS6236279Y2 true JPS6236279Y2 (enExample) 1987-09-16

Family

ID=30369619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982169157U Granted JPS5972726U (ja) 1982-07-30 1982-11-08 拡散治具のマザ−ボ−ト

Country Status (1)

Country Link
JP (1) JPS5972726U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2802234B2 (ja) * 1994-08-31 1998-09-24 信越石英株式会社 シリコンウエハ熱処理用組合せ治具とその製造方法

Also Published As

Publication number Publication date
JPS5972726U (ja) 1984-05-17

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