JPS6454330U - - Google Patents
Info
- Publication number
- JPS6454330U JPS6454330U JP1987148111U JP14811187U JPS6454330U JP S6454330 U JPS6454330 U JP S6454330U JP 1987148111 U JP1987148111 U JP 1987148111U JP 14811187 U JP14811187 U JP 14811187U JP S6454330 U JPS6454330 U JP S6454330U
- Authority
- JP
- Japan
- Prior art keywords
- divided
- crucible
- pedestal
- graphite
- convex protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987148111U JPH0538059Y2 (enExample) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987148111U JPH0538059Y2 (enExample) | 1987-09-30 | 1987-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454330U true JPS6454330U (enExample) | 1989-04-04 |
| JPH0538059Y2 JPH0538059Y2 (enExample) | 1993-09-27 |
Family
ID=31419130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987148111U Expired - Lifetime JPH0538059Y2 (enExample) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538059Y2 (enExample) |
-
1987
- 1987-09-30 JP JP1987148111U patent/JPH0538059Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538059Y2 (enExample) | 1993-09-27 |