JPH0536395B2 - - Google Patents

Info

Publication number
JPH0536395B2
JPH0536395B2 JP61055766A JP5576686A JPH0536395B2 JP H0536395 B2 JPH0536395 B2 JP H0536395B2 JP 61055766 A JP61055766 A JP 61055766A JP 5576686 A JP5576686 A JP 5576686A JP H0536395 B2 JPH0536395 B2 JP H0536395B2
Authority
JP
Japan
Prior art keywords
seed crystal
support jig
piece
crystal support
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61055766A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62212291A (ja
Inventor
Atsushi Iwasaki
Shigeru Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP5576686A priority Critical patent/JPS62212291A/ja
Publication of JPS62212291A publication Critical patent/JPS62212291A/ja
Publication of JPH0536395B2 publication Critical patent/JPH0536395B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5576686A 1986-03-13 1986-03-13 種結晶支持治具 Granted JPS62212291A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5576686A JPS62212291A (ja) 1986-03-13 1986-03-13 種結晶支持治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5576686A JPS62212291A (ja) 1986-03-13 1986-03-13 種結晶支持治具

Publications (2)

Publication Number Publication Date
JPS62212291A JPS62212291A (ja) 1987-09-18
JPH0536395B2 true JPH0536395B2 (enrdf_load_stackoverflow) 1993-05-28

Family

ID=13007981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5576686A Granted JPS62212291A (ja) 1986-03-13 1986-03-13 種結晶支持治具

Country Status (1)

Country Link
JP (1) JPS62212291A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3376877B2 (ja) * 1997-09-02 2003-02-10 信越半導体株式会社 種結晶保持具
CN102051681A (zh) * 2010-12-31 2011-05-11 镇江荣德新能源科技有限公司 一种用于制备单晶硅的籽晶
CN110230093B (zh) * 2019-07-10 2020-12-15 深圳市全普科技有限公司 一种用于单晶硅生长炉的籽晶夹持提拉装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54123477A (en) * 1978-03-10 1979-09-25 Tokai Tanpaku Shiryo Kk Production of feed based on feather
JPS59131596A (ja) * 1983-01-18 1984-07-28 Hitachi Metals Ltd 種結晶支持具
JPS59174594A (ja) * 1983-03-18 1984-10-03 Hamamatsu Photonics Kk 種結晶保持装置
JPS60239390A (ja) * 1984-05-10 1985-11-28 Mitsui Mining & Smelting Co Ltd 単結晶育成用種結晶の保持方法
JPS6110098A (ja) * 1984-06-25 1986-01-17 Fujitsu Ltd 単結晶成長装置

Also Published As

Publication number Publication date
JPS62212291A (ja) 1987-09-18

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