JPH0535557Y2 - - Google Patents

Info

Publication number
JPH0535557Y2
JPH0535557Y2 JP2634286U JP2634286U JPH0535557Y2 JP H0535557 Y2 JPH0535557 Y2 JP H0535557Y2 JP 2634286 U JP2634286 U JP 2634286U JP 2634286 U JP2634286 U JP 2634286U JP H0535557 Y2 JPH0535557 Y2 JP H0535557Y2
Authority
JP
Japan
Prior art keywords
filament
insulating
insulating stand
expansion
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2634286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62137548U (instruction
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2634286U priority Critical patent/JPH0535557Y2/ja
Publication of JPS62137548U publication Critical patent/JPS62137548U/ja
Application granted granted Critical
Publication of JPH0535557Y2 publication Critical patent/JPH0535557Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2634286U 1986-02-24 1986-02-24 Expired - Lifetime JPH0535557Y2 (instruction)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2634286U JPH0535557Y2 (instruction) 1986-02-24 1986-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2634286U JPH0535557Y2 (instruction) 1986-02-24 1986-02-24

Publications (2)

Publication Number Publication Date
JPS62137548U JPS62137548U (instruction) 1987-08-29
JPH0535557Y2 true JPH0535557Y2 (instruction) 1993-09-09

Family

ID=30827338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2634286U Expired - Lifetime JPH0535557Y2 (instruction) 1986-02-24 1986-02-24

Country Status (1)

Country Link
JP (1) JPH0535557Y2 (instruction)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0635362Y2 (ja) * 1988-01-26 1994-09-14 日新電機株式会社 イオン注入装置のチャージアップ低減用の電子銃装置
JPH0753249Y2 (ja) * 1989-04-04 1995-12-06 日新電機株式会社 電子銃装置

Also Published As

Publication number Publication date
JPS62137548U (instruction) 1987-08-29

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