JPH05343443A - Platelike object conveyor - Google Patents

Abstract

PURPOSE:To obtain a platelike object conveyor having high operability by providing a special container, a suction head and an unnecessary object discharge unit in a separator. CONSTITUTION:The platelike object conveyor comprises a separator 32 for separating to output stacked platelike objects 6, a conveying stage 34 for constituting a conveying passage of the objects 6, and a supply unit 33 for supplying the object 6 output by the separator 32 to the stage 34. The separator 32 of such a platelike object conveyor 31 has a container 36 for containing the stacked objects 6, a suction head 21 for sucking the object 6 contained in the container 36 and conveying one by one the objects to the unit 33, and an unnecessary object discharge unit 37 for discharging the unnecessary object sucked by the head 12. The unit 33 supplies the object 6 to the stage 34 while pressing the front end of the object 6 to the rear end of the object 6 of the stage 34. The unit 37 is, for example, a temporarily containing box 37 for temporarily containing, for example, the double objects 6 and a sheet between layers, etc.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-shaped material conveying device for conveying a plate-shaped lead frame on which a semiconductor chip is mounted.

[0002]

2. Description of the Related Art For example, in order to manufacture a semiconductor device, a plate-shaped lead frame is sequentially conveyed to a bonding position,
A semiconductor chip may be mounted on the lead frame at the bonding position. In addition to this, there is a case where a lead frame on which a semiconductor chip is mounted is conveyed toward a process of processing and assembling. At present, as shown below, a device for highly accurately transporting the lead frame has been developed.

That is, in this type of transfer device,
For example, the separation unit 1 shown in FIG. 10 and the supply unit 2 shown in FIG.
The transport stage 3 and the guide portions 4 and 5 shown in FIG. 13 or 14 are properly combined.

Of these, in the separation section 1 of FIG. 10, a plurality of rectangular plate-shaped lead frames 6 ...
It is stored in a stacked state. Storage 7
Has a supporting plate 8, holding columns 9 ..., And an up-and-down mechanism section 10, and the lead frame 6 is mounted on the supporting plate 8. Then, the up-and-down mechanism unit 10 moves the support plate 8 up and down,
Adjust the height of the top lead frame 6.

An optical sensor 11 is arranged in the vicinity of the housing portion 7, and the optical sensor 11 detects the position of the lead frame 6 at the uppermost stage. Then, the vertical mechanism section 10 is driven based on the output of the optical sensor 11, and the lead frame 6 is driven.
The position of the uppermost lead frame 6 is maintained at a constant height regardless of the number of.

The separating section 1 is provided with a suction head 12, which is connected to an X-axis driving device 13 and a Z-axis driving device 14. The suction head 12 is displaced in the horizontal direction (X-axis direction) and the vertical direction (Z-axis direction). Then, the suction head 12 sucks the topmost lead frame 6 among the lead frames 6 ... In the storage section 7.

That is, the suction head 12 is the topmost lead.
The dray frame 6 is held and separated from the other lead frames 6 ... In the storage section 7. Then, the separated and taken out reel
The dframe 6 is conveyed toward the supply unit 2 and supplied to the supply frame 2.
It is placed on the rule 15, 15.

The lead frame 6 is generally made of a copper plate or the like, and the lead frame 6 is provided with a lead pattern for connecting semiconductor chips by a method such as etching. Has been formed.

Further, in the storage section 7, an interlayer paper (not shown) may be sandwiched between the lead frames 6 ... Generally, this interlayer paper is stacked alternately with the lead frame 6 and is interposed between the lead frames 6 ...
Prevents the lead patterns of the lead frame 6 ... from overlapping and deforming. The thickness of the interlayer paper is, for example, about 1/10 of the thickness of the lead frame 6.

In the supply unit 2 shown in FIG. 12, the supply rails 15 and 15 and the guide roller 1 arranged substantially parallel to each other.
6 and a feeding unit (not shown). Further, the supply unit 2 is provided with a stopper 17, and the stopper 17 is vertically driven by an actuator 18. Then, the stopper 17 projects upward from between the supply rails 15 and 15 to position the lead frame.

That is, the lead frame 6 is supplied by the supply rail 1.
When placed on Nos. 5 and 15, the feed section feeds the lead frame 6, and the guide rollers 16 ...
Are guided to move along the supply rails 15, 15. Further, the front end of the lead frame 6 contacts the stopper 17, and the lead frame 6 is temporarily stopped and positioned at the reference position. When the positioning of the lead frame 6 is completed, the stopper 15 descends and retracts, and the lead frame 6
Is continued.

A transport stage 3 is arranged downstream of the supply unit 2. The guide rails 19 and 1 are provided on the transport stage 3.
9 are provided and rail grooves 20, 20 are formed in the guide rails 19, 19. Then, the lead frame 6 is supplied from the supply unit 2 to the transport stage 3.
Moves along the guide rails 19 and 19 while inserting its side edges into the rail grooves 20 and 20.

Pilots arranged along the side edges of the lead frame 6 for moving the lead frame 6 on the transport stage 3, as shown schematically in FIG. Hole 2
1 ... is used. That is, the guide stage 4 having the pilot pin 22 is provided in the carrying stage 3, and the pilot pin 22 is arranged in the vertical direction and before and after the lead frame 6 as shown by arrows A to D in the figure. Move in the direction.
Then, the pilot pin 22 is inserted into the pilot hole 21 and locked to the lead frame 6, and the lead frame 6
Pull forward to move.

Further, as shown in FIG. 14, when there is no pilot hole in the lead frame 6, the drive roller 23 for feeding the lead frame 6 and the lead frame 6 are provided. The guide portion 5 having the stopper pin 24 arranged at the stop position is used. The guide portion 5 rotates the drive roller 24 to send the lead frame 6 and also to the lead frame.
The front end of the frame 6 collides with the stopper pin 24 to stop the lead frame 6 for positioning. Further, when the lead frame 6 is pitch-fed at regular intervals, the stopper pin 24 moves back and forth and up and down as shown by arrows A to D in the figure.

[0015]

By the way, in the above-described conventional conveying apparatus, the separating section 1, the supplying section 2, and the guide sections 4 and 5 have the following problems, respectively.

That is, in the separating section 1 of FIG. 10, when the separation of the lead frames 6 ... There was a chance that a harvest would occur. In this case, it is necessary to stop the conveying device and the peripheral devices and separate the lead frames 6, 6 one by one. For this reason, the double picking of the lead frames 6 has been a cause of lowering the operating rate.

Further, when the interlayer paper is sandwiched between the lead frames 6, ..., The interlayer paper was blown away in the longitudinal direction of the apparatus, that is, the conveying direction by a method such as air blow. It was a cause of noise, obstruction of cleaning, and enlargement of the device.

Further, conventionally, as shown in FIG. 11, a stroke E in the X-axis direction of the suction head 12, that is, in the horizontal direction, is provided.
Was constant. When the types of the lead frames 6 are changed and the dimensions of the lead frames to be handled change, the width of the storage section 7 and the interval between the supply rails 15 and 15 are
As shown by the chain double-dashed line in the figure, the center positions were adjusted before and after the product type switching. In other words, the storage section 7 and the supply rails 15 and 15 required a double opening mechanism for adjusting the width and the distance while maintaining the center position. And
The transport device was expensive accordingly.

In the supply section 2, the lead frame 6 generally has a thickness of 0.2 mm or less and the lead frame 6 has a thickness of 0.2 mm or less.
Since the frames 6 ... are fragile, the lead frame 6 ...
It sometimes deformed when pressed by 7. Further, the deformation of the lead frame 6 may cause a decrease in product reliability.

Further, since the stopper 17 is used for positioning the lead frame 6, there is a space between the lead frames 6 on the carrying stage 4. The size of this gap was at least about the thickness of the stopper 17. Therefore, the pitch of the semiconductor chips mounted on the lead frame 6 increases correspondingly,
The operation rate of the equipment was low.

Further, since the stopper 17 is used for positioning the lead frame 6, the time required for positioning the lead frame 6 ... .. was pressed against the stopper 17 was included. Therefore, the lead frame 6 ...
Took a long time to position.

Further, as shown in FIG. 13, the lead frame is
When the pilot holes 21 ... Are provided in the holes 6 ..., all the pilot holes 21 ...
In order to smoothly insert into the hole, a certain amount of clearance was required between the pilot holes 21 ... And the pilot pin 22. Therefore, in the guide portion 4, the pilot hole 2
The positioning accuracy was limited due to the gap between 1 and the pilot pin 22, and the positioning accuracy was low.

For positioning with an accuracy of, for example, about 0.01 mm, a reference pin (not shown) for positioning the lead frame 6 ... Is required in addition to the pilot pin 22. When the reference pin is provided, there is a problem that the device is expensive because of the reference pin. Further, when the type of the lead frame 6 ... Is changed, it is necessary to change the position of the reference pin, so that it takes a lot of time to switch the type.

On the other hand, as shown in FIG. 14, when the lead frame 6 does not have a pilot hole, the lead frame 6 stops when the lead frame 6 is conveyed at high speed. It was thought that they would be hurt by colliding with. For this reason, this type of guide portion 5 could not be applied to high-speed conveyance. Further, since the lead frame 6 collides with the stopper pin 24 and retracts somewhat, it is difficult to improve the positioning accuracy. It is an object of the present invention to provide a plate-shaped material conveying device having a high operating rate.

[0025]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a separating portion for separating and taking out stacked plate-like objects, and a conveying stage for forming a conveying path for the plate-like objects. And the plate-like object taken out by the separation unit
In a plate-shaped object transporting device including a supply section for supplying the plate-shaped objects, a separation section, and a storage section in which the plate-shaped objects are stacked and stored,
An adsorption head that adsorbs the plate-like material accommodated in the accommodating portion and conveys it to the supply portion one by one, and an unnecessary material discharging portion that discharges the unnecessary material adsorbed by the adsorption head are provided.

Further, the present invention comprises a conveying stage which constitutes a conveying path for the plate-like object, and a supply unit which is arranged in front of this conveying stage and supplies the plate-like object to the conveying stage. In the plate-shaped material conveying device, the supply unit supplies the plate-shaped material to the conveyance stage while pressing the front end of the plate-shaped material against the rear end of the plate-shaped material of the conveyance stage.

Further, according to the present invention, a plate-like object provided with a conveying stage forming a conveying path for the plate-like object and a guide portion for feeding the plate-like object supplied to the conveying stage while guiding it. In the carrying device, the guide part includes a holding part that moves along the carrying stage while holding and holding the plate-like object in the thickness direction. And this invention was made possible to improve an operating rate.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The same parts as those described in the section of the related art are designated by the same reference numerals, and the description thereof will be omitted.

1 to 9 show an embodiment of the present invention, and the reference numeral 31 in FIG. 1 is a plate-like material conveying device (hereinafter referred to as a conveying device). The transport device 31 includes a separating unit 3
2, a supply unit 33, a conveyance stage 34, and a guide unit 35 shown in FIG.

Of these, the separation section 32 is a storage section 36 for storing a plurality of lead frames 6 as plate-like objects in a stacked state, and is movable in the X-axis direction and the Z-axis direction in FIG. The suction head 12 and a temporary storage box 37 as a waste material discharging portion arranged near the storage portion 36 are provided.

The accommodating portion 36 has a support plate 8 oriented horizontally.
The five holding columns 9a to 9e are made to project substantially right above. The lead frames 6 are mounted on the support plate 8 and have four end surfaces aligned with the opposite side edges in the longitudinal direction and one end in the longitudinal direction facing the holding columns 9a to 9e. The support plate 8 is supported by the up-and-down mechanism unit 10, and the up-and-down mechanism unit 10 raises the support plate 8 along the holding columns 9a to 9e.
Lower it.

Some of the holding columns 9a to 9e
d and 9e move in the horizontal direction (X-axis direction). That is,
The storage section 36 is provided with a side opening mechanism (not shown), and the side opening mechanism is connected to the holding columns 9d and 9e. Then, the holding columns 9d and 9e slide along the guide holes 8a and 8b opened in the support plate 8 to provide the lead frame.
The distance between the holding columns 9a and 9b facing each other in the width direction of the columns 6 is changed. The distance between the holding columns 9d, 9e and 9a, 9b is adjusted by the opening mechanism to handle the lead frame.
It is adjusted according to the width of the mu 6 ... The storage section 36
It is also conceivable to provide a mechanism for moving the intermediate holding column 9c according to the length of the lead frame 6.

An optical sensor 11 is arranged in the vicinity of the storage section 36, and the optical sensor 11 detects the uppermost lead frame 6 of the stacked lead frames 6.

The suction head 12 is supported by an X-axis drive unit 13 and a Z-axis drive unit 14, and the X-axis drive unit 13 is provided.
Is attached to the tip of the slider 38 facing downward. Z
The axis drive unit 14 is fixed at a fixed position, and the X-axis drive unit 1
3 is connected to the Z-axis drive unit 14. Z-axis drive unit 14
Moves the X-axis drive unit 13 together with the slider 39 in the vertical direction, that is, the Z-axis direction.

Further, the X-axis drive section 13 has an actuator 40 and a transmission section 41, and the actuator 40
And the slider 38 are connected to each other via a transmission portion 41.
The driving force of the actuator 40 is transmitted to the slider 38 via the transmission portion 41. Then, the X-axis drive unit 13 moves the slider 38 forward and backward to displace the suction head 12 in the horizontal direction, that is, the X-axis direction.

That is, the suction head 12 has the Z-axis drive unit 14
The height is adjusted by the X-axis drive unit 13 and the X-axis drive unit 13 moves the height horizontally. Further, the suction head 12 is
It stops at an arbitrary position in both directions of the Z axis and the X axis.

Here, as the actuator 40, a digitally controllable one such as a pulse motor or a servo motor is adopted. In addition, in the transmission unit 41,
The rack and pinion mechanism is adopted.

The suction head 12 is connected to a negative pressure source (not shown) via a negative pressure pipe 42. further,
The lower surface of the suction head 12 is in contact with the uppermost lead frame 6 of the lead frames 6 ... Stacked in the storage section 7 and sucks and holds the lead frame 6.

The temporary storage box 37 is formed in a rectangular parallelepiped shape, and its upper portion is opened in a rectangular shape. Further, the size of the temporary storage box 37 is set to be slightly larger than the outer diameter of the lead frame 6 so that the lead frame 6 can be stored in a horizontal state. And the temporary storage box 37 is
The temporary storage box 37 is arranged between the storage section 7 and the Z-axis drive section 14, and the longitudinal direction of the temporary storage box 37 is substantially the same as the longitudinal direction of the lead frame 6 ... Stored in the storage section 7. It is set to be parallel.

The supply section 33 is provided with two supply rails 15a and 15b as shown in FIG. Supply rate
Both the rulers 15a and 15b are formed in a prismatic shape, and are arranged parallel to each other and horizontally. The heights of the supply rails 15a and 15b are both set to be equal.

Four guide rollers 16a, 16a, 16b and 16b are provided on the supply rails 15a and 15b as a set. In each set, the guide rollers 16a and 16b are arranged at the same position in the longitudinal direction of the supply rails 15a and 15b, and the distance between them is freely changed. That is, the lead frame 6 is placed on the supply rails 15a and 15b, and the guide roller 16a is provided.
Two to 16b are in contact with each side edge of the lead frame 6 at two locations. The interval between the guide rollers 16a and 16b of each set changes according to the width of the lead frame 6 to be handled. Here, the lead frame 6 has its both edge portions in contact with both supply rails 15a and 15b.
It straddles 5a and 15b.

Further, as shown in FIG. 4, the supply section 33 is provided with a feed section 43, and the feed section 43 is arranged below the supply rails 15a and 15b. Further, the feeding section 43 is provided with a pulse mode on a support body 44 fixed at a fixed position.
The motor 45, the feed screw 46, and the guide shaft 47 are attached. The feed screw 46 is oriented substantially parallel to the supply rails 15 and 15 and is connected to the pulse motor 45. Further, the guide shaft 47 is provided with the feed screw 4
6 are spaced apart from each other and arranged in parallel.

Further, the feeding section 43 is provided with a moving section 48, and this moving section 48 is connected to both the feed screw 46 and the guide shaft 47. The connection between the moving portion 48 and the feed screw 46 is performed by using a nut 49 screwed to the feed screw 46. Further, a feed arm 50 shaped like a strip plate is fixed to the moving portion 48.

The lower end portion of the feed arm 50 is connected to the moving portion 48 and extends obliquely upward from the moving portion 48. Further, the feed arm 50 is bent at a midway portion thereof, and the upper end portion thereof extends substantially right above. The upper end of the feed arm 50 is in contact with the rear end of the lead frame 6 placed on the supply rails 15a and 15b. The contact position between the feed arm 50 and the lead frame 6 is set to the widthwise intermediate portion of the lead frame 6.

When the pulse motor 45 rotates the feed screw 46, the moving portion 48 moves in accordance with the amount of rotation of the feed screw 46, and the feed arm 50 is guided by the guide shaft 47, as shown by the arrow F. Thus, it is displaced integrally with the moving part 48. Then, the feed arm 50 supplies the supply rail 15a,
The lead frame 6 on 15b is pushed from the rear to the front so that the lead frame 6 is guided by the guide rollers 16 ...
Sent along 5b.

Here, the moving section 48 (and the feed arm 5)
0) is stopped by the guide shaft 47. The pulse motor 45 is controlled according to the type of the lead frame 6 to be sent.

The transport stage 34 is arranged at the latter stage of the supply unit 33, and is provided with guide rails 51, 51 continuously arranged with respect to the supply rails 15a, 15b. The guide rails 51, 51 are spaced at uniform intervals over the entire length and face each other in parallel.

Further, the guide rails 51, 51 have rail grooves 52, 52, respectively.
52 extends substantially horizontally along the longitudinal direction of the guide rails 51, 51. The rail grooves 52, 52 face each other and are located at substantially the same height. Further, the width of the rail groove 52 is set to be slightly larger than the thickness of the lead frame 6 ..., and the lead frame 6 sent from the supply section 33 is placed inside the rail groove 52. Be plugged into.

As shown in FIGS. 5 (a) and 5 (b),
At the receiving end 53 of the groove 52, 52, an inclined surface 54a,
54b is formed. One inclined surface 54a is vertically inclined, and the other 54b is horizontally inclined. The opening area of the rail groove 52 at the receiving-side end portion 53 increases as it approaches the end surfaces 55 and 55 of the guide rails 51 and 51. Further, as shown in FIG. 5B, the bottom surfaces 56 of the rail grooves 52, 52 at the receiving end 53 are formed flat.

7A to 7C, the guide portion 35 is shown.
It is shown. Although only one guide portion 35 is shown in the figure, a plurality of guide portions 35 are provided in the transport stage 34.
The guide portions 35 are arranged along one guide rail 51. Each guide portion 35 has a substantially similar structure. Therefore, in the present embodiment, only one guide portion 35 will be described, and description of the other guide portions 35 will be omitted. The guide portion 35 includes the holding portion 57 and the linear guide 5
8 and is arranged at a midway portion of one guide rail 51 in the longitudinal direction.

As shown in FIGS. 7 (a) and 7 (b), the holding portion 57 is provided with two plate-like claws 59, 59. These claws 59, 59 have their plate surfaces guided by the guide rails 5.
Along with the longitudinal direction of 1, 51, the lead frame
The plates 6a, 6b, ... (Only 6a is shown) are oriented substantially perpendicular to the plate surfaces.

Further, the claws 59, 59 are arranged vertically, and their flat edges are made to face each other and run parallel to the plate surface of the lead frame 6a. The claws 59, 59 are provided with the first and second swing arm 6
It is fixed to the tip of 0 and 61.

Both swing arms 60 and 61 are arranged vertically, and are arranged substantially on the same straight line. Further, both swinging arms 60 and 61 are pivotally supported by the arm holding portion 62,
It rotates up and down around the pivots 63 and 64, respectively. Further, the pivot portions 63 and 64 are arranged substantially on the same straight line.

An engaging groove 65 is formed in the first swing arm 60 arranged in the upper stage, and the engaging groove 65 is notched in a U shape and extends vertically. Further, the second swing arm 61 arranged in the lower stage has a cylindrical engagement pin 6
6 is provided to project substantially horizontally, and the engaging pin 66 is inserted into the engaging groove 65 from below. As shown in FIG. 8, the diameter of the engaging pin 66 and the width of the engaging groove 65 have some gap between the outer peripheral surface of the engaging pin 66 and the edge of the engaging groove 65. 67 is formed. The size H of the gap 67 is set to, for example, 0.1 mm or more.

Further, both arms 60, 61 are connected via a coil spring 68, and both ends of the coil spring 68 are connected to connecting pins 69, 69 projecting from the swinging arms 60, 61. It is connected. Further, the coil spring 68 has the claws 59, rather than the two swing arms 60, 61.
It is located in the region close to 59.

The lower second swing arm 61 is provided with a rotatable cam follower 70, and the cam follower 70 faces an eccentric cam 71. Then, the cam follower 70 moves along with the rotation of the eccentric cam 71.
It rotates while being pressed by 1.

Further, the first swing arm 60 has the claw 59 wound around the inside of the guide rail 51 from above. Further, the second swing arm 61 is inserted into the slide hole 72 formed in the guide rail 51, and the claw 59 is wrapped around the inside of the guide rail 51 from below.

The arm holding portion 62 of the holding portion 57 is connected to the slider 73 of the linear guide 58. The linear guide 58 extends in the longitudinal direction of the carrying stage 34, that is, in the carrying direction of the lead frame 6a. Next, the operation of the above-described transport device 31 will be described.

First, in the separating section 32 in FIG. 1, the vertical mechanism section 10 of the storage section 36 is driven based on the output of the optical sensor 11, and the position of the uppermost lead frame 6 is set to a predetermined height. Tailored to suit. The X-axis driving unit 13 and the Z-axis driving unit 14 are driven, and the suction head 12 is moved to the lead frame 6 ...
Sent to.

The adsorption head 12 adsorbs and takes out the lead frame 6 at the uppermost stage, moves in the X-axis direction, and conveys the lead frame 6 to the supply section 33. Then, the suction head 12 places the lead frame 6 on the supply rails 15, 15. The movement amount of the suction head 12 in the X-axis direction is adjusted by the actuator 40.

Next, the suction head 12 is again attached to the storage unit 3
Move to side 6. When the interlayer paper is not sandwiched between the lead frames 6 ..., the suction head 12 reciprocates between the storage section 36 and the supply section 33, and only carries out the work of conveying the lead frames 6. ..

However, for example, two lead frames 6 ...
When two sheets are picked up, the suction head 12 moves to the temporary storage box 37, and the two lead frames 6, 6 are temporarily stored in the temporary storage box 37. Then, the suction head 12 returns to the storage section 36, and the lead frame of the storage section 36 is read.
The work of transporting the frames 6 to the supply unit 33 is restarted. In this case, the two lead frames are unnecessary. Here, it is conceivable that the occurrence of double pickup of the lead frames 6 is detected by, for example, the double pickup detection sensor 74 attached to the suction head 12.

On the other hand, in the storage section 36, the lead frame is
When an interlayer paper (not shown) is sandwiched between the frames 6 ..., the suction head 12 sucks the interlayer paper, moves in the X-axis direction, passes the supply unit 33, and moves to the temporary storage box 37. Head over. Then, the suction head 12 discharges the interlayer paper into the temporary storage box 37. That is, the suction head 12 is connected to the lead frame 6
The carrying work of ... And the discharging work of the interlayer paper are alternately performed. In this case, the interlayer paper becomes unnecessary.

In the supply unit 33 shown in FIG. 4, the suction heads 12 of the separation unit 32 supply the supply rails 15a, 15a.
The lead frame 6 is placed on b. The feed arm 50 of the feed section 43 moves between the supply rails 15a and 15b along the longitudinal direction of both rails 15a and 15b as indicated by an arrow G, and the lead frame 6 is provided. While pressing, approaches the transport stage 34.

At this time, the lead frame 6 is connected to the guide roller.
While being guided by the rollers 16a and 16b, the transport station
Move towards J34. Guide rollers 16a-16b
The pressure applied to the lead frame 6 depends on the frictional force between the lead frame 6 and the lead frame 6.
It is set small so as not to hinder the movement of the dframe 6. And the positioning of the lead frame 6 in the width direction is
It is performed by the guide roller 16.

The lead frame 6 pushed by the feed arm 50 is fed to the carrying stage 34 with its side edge portion entering the rail groove 52 of the carrying stage 34. That is, the lead frames 6a and 6b move substantially horizontally along the longitudinal direction of the guide rails 51 and 51, with the side edge portions thereof being inserted into the rail grooves 52.

Here, in FIG. 4, the reference numeral 6 is attached to the lead frame existing in the supply unit 33, and the reference numeral is assigned to the lead frame already sent to the carrying stage 34. 6
a and 6b are attached.

The front end of the lead frame 6 on the supply portion 33 is brought into contact with the rear end of the front lead frame 6a.
While moving, push the front lead frame 6a. Then, the lead frame 6 supplied to the carrying stage 34.
The a and 6b are conveyed in one direction without a gap while being in contact with each other.

The lead frame 6 pushed by the feed arm 50 stops at the same time as the feed arm 50 stops. That is, the lead frame 6 is fed to the reference position by the feed arm 50 and positioned at the stopped position. With the stop of the lead frame 6 on the supply unit 33, the lead frames 6a and 6b on the transport stage 34 also stop.

Further, the feed arm 50, after stopping, moves in the opposite direction and returns to the original position. And the suction head 1
2 supplies the next lead frame 6 with supply rails 15a and 15b.
It is placed on the top, and the feed arm 50 pushes the lead frame 6 from the rear. The lead frames 6a, 6b, ... On the transport stage 34 are pitch-fed according to the reciprocating pitch of the feed arm 50.

In the guide portion 35 shown in FIGS. 7A to 7C, the claws 59, 59 of the holding portion 57 are the lead frame 6a.
One side edge is sandwiched from above and below, and the lead frame 6
Hold a. The holding unit 57 moves integrally with the lead frame 6a while holding the lead frame 6a, and guides the lead frame 6a in the carrying direction. The holding portion 57
Is guided by the linear guide 58. When the holding portion 57 moves, the second swing arm 61 slides along the slide hole 71 of the guide rail 51.

When the lead frame 6a is stopped, the holding portion 57 is also stopped. Then, the lead frame 6a is subjected to predetermined processing while the holding portion 57 holds the lead frame 6a. When the predetermined processing is completed, the claws 59, 59 are opened and the lead frame 6a is opened as described later.
Is released. Then, the sandwiching portion 57 is provided with the linear guide 5
Return to the original position while being guided by 8. Then, the next lead frame 6a is sandwiched, and the lead frame 6a is prepared for conveyance.

The pawls 59, 59 are released as follows. That is, as shown in FIG. 9, when the eccentric cam 70 rotates, the cam follower 69 provided on the second swing arm 61 is pushed up by the eccentric cam 70. The second swing arm 61 rotates about the pivot 64, and the tip of the second swing arm 61 descends as shown by arrow I.

Since the first swing arm 60 and the second swing arm 61 are engaged with each other via the engagement pin 66, the second swing arm 60 and the second swing arm 61 are engaged with each other.
The force of the swing arm 61 is transmitted to the first swing arm via the engaging pin 66. The engagement pin 66 has the claws 59, 59.
When it is closed, it is located between both pivots 63, 64,
When it is opened, it is displaced forward (on the side of the claws 59, 59) while drawing an arc along with the rotation of the second swing arm.

The engagement pin 66 is loosely fitted in the engagement groove 65. Then, the engagement pin 66 has a gap 67 in the engagement groove 65.
Of the first swing arm 6 while displacing according to the size H of the
Press 0. The first swing arm 61 is connected to the pivot 6
Raise the tip about 3 as shown by arrow J. First
The displacement amounts of the swing arm 60 and the second swing arm 61 are substantially equal.

Both arms 60 and 61 are coil springs 6.
It is always urged to close by 7. The holding force of the claws 59, 59 is determined by the coil spring 67.

That is, in the transport device 31 as described above, the separating section 32 is provided with the temporary storage box 37, and the storage section 3 serves as a place for storing the lead frames 6.
6, the supply unit 33, and the temporary storage box 37 are set. An actuator 40 capable of digital control is employed as a drive source for the suction head 12 in the X-axis direction. Then, when two sheets of the lead frame 6 ... Are picked up, the suction head 12 moves toward the temporary storage box 37, and the two picked lead frames are placed in the temporary storage box 37. Store temporarily.

Therefore, even if two lead frames 6 ... Are picked up, the two picked lead frames can be discharged without stopping the entire apparatus.
Then, the operating rates of the transport device 31 and peripheral devices can be improved.

Further, even when the interlayer paper is sandwiched between the lead frames 6 ... If the interlayer paper is held by the suction head 12 and the interlayer paper is discharged to the temporary storage box 37, the interlayer paper is discharged. There is no need to use an air blower. Therefore, the noise is reduced, the cleanliness is maintained, and the transport device 31 is downsized.

Further, an actuator 40 capable of digital control is adopted as a drive source of the suction head 12 in the X-axis direction, and the suction head 12 can be stopped at any position in the X-axis direction. Therefore, the arrangement of the lead frames 6 ... In the storage section 36 and the supply section 33 depends on the suction head 1.
Not restricted by the movable range of 2.

That is, when the stroke of the suction head 12 is constant as in the conventional case, the storage section 36 and the supply section 33 are provided.
It was necessary to open both the holding columns 9a, 9b, 9d, 9e and the supply rails 15a, 15b in the X-axis direction. However, in the present embodiment, the stroke of the suction head 12 can be arbitrarily changed as indicated by the symbols K and N in FIG. Then, when the types of the lead frames 6 ... Are switched, the stroke of the suction head 12 can be changed in accordance with the center position of the lead frames 6.

Therefore, it is possible to adopt a one-way opening mechanism that opens only the holding columns 9d and 9e and one of the supply rails 15b in the storage section 36 and the supply section 33, and the transport device 31 becomes inexpensive.

Further, in the supply unit 33, the feeding unit 43
Feed arm 50 pushes the lead frame 6 from the rear,
The lead frames 6a, 6b, ... On the carrying stage 24 are carried while being pushed by the lead frames 6 on the supply section 33. Therefore, the lead frames 6, 6a, 6
b, ... Can be conveyed without a gap. Then, the productivity is improved and the operation rate of the transfer device 31 is improved.

That is, in general, when the lead frames 6 are continuously conveyed along the longitudinal direction, as shown in FIG. 6, the mounting pitch P of the lead frames 6 ... The relationship with the distance L from the longitudinal end of the dframe 6 to the mounting position is expressed as follows. P = 2L + ΔL where ΔL is the interval between the lead frames 6 ...

Therefore, if the lead frames 6 ... Can be transported without a gap as in this embodiment, .DELTA.L = 0.
Therefore, the mounting pitch P can be reduced. Further, it becomes possible to mount a larger number of semiconductor chips 75 ... And the productivity and the operating rate are improved.

Here, in FIG. 4, the semiconductor chip 7
Only a part of 5 ... Is shown. Further, the carrier device 31 of the present embodiment can be applied to a lead frame in which semiconductor chips are mounted in a row, and also to a lead frame in which a plurality of rows are mounted.
It is also applicable to

Moreover, since the lead frame 6 can be positioned without pressing the lead frame 6 against the stopper as in the conventional case, the deformation of the lead frame 6 can be prevented. Therefore, product reliability and yield can be improved.

A guide portion 35 is also provided, and the guide portion 35 guides the lead frame 6a by sandwiching it with the claws 59, 59. Therefore, the lead frame 6a can be guided regardless of whether the pilot holes 21 ... Are present. And the degree of freedom in the form of objects that can be transported increases,
Product type switching becomes easy. Further, since there are almost no replacement parts that quickly wear out, the transportation device 31 becomes inexpensive.

Further, in the holding portion 57, the engaging pin 6
Since a gap 67 having an appropriate size H is formed between the engagement groove 6 and the engagement groove 65, the plurality of guide portions 35 can reliably guide the lead frames 6a, 6b ,. ..

That is, when there is no gap 67 between the engagement pin 66 and the engagement groove 65, the respective lead frames 6a, 6 are provided.
If there are variations in the plate thicknesses b, ... Or the mounting accuracy of the claws 59, 59, these variations cannot be absorbed, and some of the guide portions 35 cannot properly hold the lead frame. However, if a gap is formed between the engagement pin 66 and the engagement groove 65, the above-mentioned variation can be absorbed, and the lead frames 6a, 6b, ... Can be reliably sandwiched. .. Therefore, it is possible to prevent the occurrence of a pinching error, and it is possible to perform highly reliable transportation. further,
Since the lead frames 6a, 6, ... Can be reliably transported,
The transfer accuracy is improved, and the transfer speed can be increased. In addition,
In this embodiment, the lead frame 6 ...
However, the present invention can be applied to the transportation of a plate-shaped object other than the lead frame. The present invention can be variously modified without departing from the scope of the invention.

[0091]

As described above, according to the present invention, the separating portion for separating and taking out the stacked plate-like objects, the conveying stage forming the conveying path for the plate-like objects, and the separating portion are taken out. In a plate-shaped material conveying device including a supply unit for supplying a plate-shaped object to a conveyance stage, a separation unit stores a stack of plate-shaped objects and stores the plate-shaped object. An adsorption head for adsorbing and conveying the adsorbents to the supply unit one by one, and an unnecessary substance discharging unit for discharging the unnecessary substances adsorbed by the adsorption head are provided.

Further, the present invention comprises a carrying stage which constitutes a carrying path for the plate-like object, and a supply unit which is arranged in the preceding stage of the carrying stage and which supplies the plate-like object to the carrying stage. In the plate-shaped material conveying device, the supply unit supplies the plate-shaped material to the conveyance stage while pressing the front end of the plate-shaped material against the rear end of the plate-shaped material of the conveyance stage.

Further, according to the present invention, there is provided a plate-like article provided with a carrying stage constituting a carrying path for the plate-like article, and a guide portion for feeding the plate-like article supplied to the carrying stage while guiding it. In the carrying device, the guide part includes a holding part that moves along the carrying stage while holding and holding the plate-like object in the thickness direction. Therefore, the present invention has an effect that the operating rate can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a separation unit according to an embodiment of the present invention.

FIG. 2 is an explanatory view showing the operation of the separation unit.

FIG. 3 is an explanatory view showing the operation of the separation unit.

FIG. 4 is a perspective view showing a supply unit and a conveyance stage according to an embodiment of the present invention.

5 (a) and 5 (b) schematically show the receiving side end of the guide rail, FIG. 5 (a) is a plan view, and FIG. 5 (b) is a line IV-IV in FIG. 5 (a). FIG.

FIG. 6 is an explanatory view showing a mounting pitch of a general lead frame.

7 (a) to (c) show a guide portion of an embodiment of the present invention, (a) is a side view, (b) is V in (a).
FIG. 6C is a sectional view taken along line V, and FIG. 7C is a sectional view taken along line VI-VI in FIG.

FIG. 8 is an explanatory diagram showing a relationship between an engagement pin and an engagement groove.

FIG. 9 is an explanatory view showing a state in which the guide portion releases the lead frame.

FIG. 10 is an explanatory view showing a conventional separating unit.

FIG. 11 is an explanatory view showing an operation of a conventional separating section.

FIG. 12 is a perspective view showing a conventional supply unit and a transportation stage.

FIG. 13 is an explanatory view showing a conventional guide portion.

FIG. 14 is an explanatory view showing a conventional guide portion.

[Explanation of symbols]

6 ... Lead frame (plate-like material), 12 ... Suction head, 3
DESCRIPTION OF SYMBOLS 1 ... Plate-shaped material conveying device, 32 ... Separation part, 33 ... Supply part, 3
4 ... Conveyance stage, 35 ... Guide part, 36 ... Storage part, 3
7 ... Temporary storage box (unnecessary object discharge part), 57 ... Clamping part.

Claims (3)

[Claims] 1. A separation unit for separating and taking out stacked plate-like objects and a conveying station forming a conveying path for the plate-like objects.
In the plate-shaped article conveying device, the sheet-shaped article conveying device comprising: a sheet feeding device for feeding the plate-shaped article taken out by the separating section to the conveying stage; An accommodating portion, an adsorption head that adsorbs the plate-shaped material accommodated in the accommodating portion and carries the adhering materials to the supply portion one by one, and an unwanted material discharging portion that expels the unwanted material adsorbed by the adsorption head. A plate-shaped object conveying device characterized by being provided. 2. A plate provided with a carrying stage which constitutes a carrying path for the plate-like object, and a supply unit which is arranged at a stage before the carrying stage and which supplies the plate-like object to the carrying stage. In the sheet conveying apparatus, the supply unit supplies the plate to the conveying stage while pressing the front end of the plate against the rear end of the plate of the conveying stage. A plate-shaped material conveying device characterized by: 3. A plate-shaped material conveying device comprising a conveyance stage which constitutes a conveyance path for a plate-shaped material, and a guide portion which guides and feeds the plate-shaped material supplied to the conveyance stage. The plate-shaped article conveying device, wherein the guide section includes a holding section that moves along the conveyance stage while sandwiching and holding the plate-shaped article in the thickness direction.